Preparation of diamondlike carbon films by high-intensity pulsed-ion-beam deposition

DOI PDF 被引用文献9件
  • Gregory P. Johnston
    Los Alamos National Laboratory, MS-E526, Los Alamos, New Mexico 87545
  • Prabhat Tiwari
    Los Alamos National Laboratory, MS-E526, Los Alamos, New Mexico 87545
  • Donald J. Rej
    Los Alamos National Laboratory, MS-E526, Los Alamos, New Mexico 87545
  • Harold A. Davis
    Los Alamos National Laboratory, MS-E526, Los Alamos, New Mexico 87545
  • William J. Waganaar
    Los Alamos National Laboratory, MS-E526, Los Alamos, New Mexico 87545
  • Ross E. Muenchausen
    Los Alamos National Laboratory, MS-E526, Los Alamos, New Mexico 87545
  • Kevin C. Walter
    Los Alamos National Laboratory, MS-E526, Los Alamos, New Mexico 87545
  • Michael Nastasi
    Los Alamos National Laboratory, MS-E526, Los Alamos, New Mexico 87545
  • Howard K. Schmidt
    SI Diamond Technology Incorporated, 2435 North Boulevard, Houston, Texas 77098
  • Nalin Kumar
    SI Diamond Technology Incorporated, 2435 North Boulevard, Houston, Texas 77098
  • Boyang Lin
    SI Diamond Technology Incorporated, 2435 North Boulevard, Houston, Texas 77098
  • David R. Tallant
    Sandia National Laboratory P.O. Box 5800, Albuquerque, New Mexico 87185-0343
  • Regina L. Simpson
    Sandia National Laboratory P.O. Box 5800, Albuquerque, New Mexico 87185-0343
  • David B. Williams
    Department of Materials Science and Engineering, Lehigh University, Bethlehem, Pennsylvania 18015-3195
  • Xiamei Qiu
    University of New Mexico/Center of Micro-Engineered Ceramics, Albuquerque, New Mexico 87131

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<jats:p>Diamondlike carbon (DLC) films were prepared by high-intensity pulsed-ion-beam ablation of graphite targets. A 350 keV, 35 kA, 400 ns beam, consisting primarily of hydrogen, carbon, and oxygen ions was focused onto a graphite target at a fluence of 15–45 J/cm2. Amorphous carbon films were deposited at up to 30 nm per pulse, corresponding to an instantaneous deposition rate greater than 1 mm/s. Electrical resistivities were between 1 and 1000 Ω cm. Raman spectra indicate that diamondlike carbon is present in most of the films. Electron-energy-loss spectroscopy indicates significant amounts of sp3-bonded carbon, consistent with the presence of DLC. Scanning electron microscopy showed most films contain 100 nm features, but micron size particles were deposited as well. Initial tests revealed favorable electron field-emission behavior.</jats:p>

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