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- C. Canali
- Istituto di Fisica, Università di Modena, Via Campi 213/A, 41100 Modena, Italy
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- L. Silvestri
- Istituto di Fisica, Università di Modena, Via Campi 213/A, 41100 Modena, Italy
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- G. Celotti
- Laboratorio LAMEL (CNR), Via Castagnoli 1, 40126 Bologna, Italy
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抄録
<jats:p>Phase formation of metal-rich Pd silicides was studied in palladium–amorphous-silicon thin-film interactions by means of 4He+-ion backscattering, Auger spectrometry, electron microprobe, and x-ray diffractometry. In the initial stage of compound formation, where both unreacted Si and Pd layers ar present, the Pd2Si phase has been observed. At increasing annealing temperature in SiO2/Si(a)/Pd systems, where the metal-film thickness was larger than that of amorphous-Si film, phases richer and richer in metal have been detected, following exactly the phase diagram reported in literature. The Pd-richest phase was identified as Pd4Si and is stable up to 650 °C in the presence of unreacted Pd. A crystallographic characterization of this new thin-film end phase was performed on the basis of a triclinic unit cell.</jats:p>
収録刊行物
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- Journal of Applied Physics
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Journal of Applied Physics 50 (9), 5768-5772, 1979-09-01
AIP Publishing
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詳細情報 詳細情報について
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- CRID
- 1364233270712851840
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- NII論文ID
- 30015874741
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- NII書誌ID
- AA00693547
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- DOI
- 10.1063/1.326717
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- ISSN
- 10897550
- 00218979
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