A plasma reactor based on the forced constricted type dc plasma jet and its application to thermal plasma processing in low pressure

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  • Satoshi Sakiyama
    Department of Electrical and Electronic Engineering, Faculty of Engineering, Yamaguchi University, 2557 Tokiwadai, Ube 755, Japan
  • Tetuya Hirabaru
    Department of Electrical and Electronic Engineering, Faculty of Engineering, Yamaguchi University, 2557 Tokiwadai, Ube 755, Japan
  • Osamu Fukumasa
    Department of Electrical and Electronic Engineering, Faculty of Engineering, Yamaguchi University, 2557 Tokiwadai, Ube 755, Japan

抄録

<jats:p>A reactor consisting of a forced constricted type dc plasma jet generator and a feed ring has been developed. In order to demonstrate the application feasibility of this reactor to low pressure plasma processing, the characteristics of the forced constricted arc in low pressure, and production of ultrafine particles of refractory materials (Al2O3, ZrC, TiC) are studied.</jats:p>

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