Contamination Determination for Silicon Carbide Cantilever Forks in Diffusion Furnaces

• Manabu Itsumi

  NTT LSI Laboratories, Atsugi‐Shi, Kanagawa 243‐01, Japan

収録刊行物

• Journal of The Electrochemical Society

  Journal of The Electrochemical Society 141 (5), 1304-1308, 1994-05-01

  The Electrochemical Society

キーワード

• Materials Chemistry
• Electrochemistry
• Surfaces, Coatings and Films
• Condensed Matter Physics
• Renewable Energy, Sustainability and the Environment
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1360018297837155456
• NII論文ID: 30016154657
• DOI: 10.1149/1.2054914
• ISSN: 19457111
• ISSN: 00134651
• Web Site: https://iopscience.iop.org/article/10.1149/1.2054914
• Web Site: https://iopscience.iop.org/article/10.1149/1.2054914/pdf
• データソース種別:
  • Crossref
  • CiNii Articles