Characterization of Microdeformation and Crystal Defects in Silicon Wafer Surfaces

• Koichi Kugimiya

  Matsushita Electronic Industry Company, Limited, Central Research Laboratory, Moriguchi, Osaka 570, Japan

収録刊行物

• Journal of The Electrochemical Society

  Journal of The Electrochemical Society 130 (10), 2123-2125, 1983-10-01

  The Electrochemical Society

キーワード

• Materials Chemistry
• Electrochemistry
• Surfaces, Coatings and Films
• Condensed Matter Physics
• Renewable Energy, Sustainability and the Environment
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1360574093711173376
• NII論文ID: 30016160810
• DOI: 10.1149/1.2119537
• ISSN: 19457111
• ISSN: 00134651
• Web Site: https://iopscience.iop.org/article/10.1149/1.2119537
• Web Site: https://iopscience.iop.org/article/10.1149/1.2119537/pdf
• データソース種別:
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  • CiNii Articles