Study of the Reaction of Si2 H 6 in the Presence of  C 2 H 2 in Synthesis of SiC Films by LPCVD Using a Macro/microcavity Method

• Lu‐Sheng Hong

  Department of Chemical Engineering, The University of Tokyo, 7‐3‐1 Hongo, Bunkyo‐ku, Tokyo 113, Japan

• Yukihiro Shimogaki

  Department of Chemical Engineering, The University of Tokyo, 7‐3‐1 Hongo, Bunkyo‐ku, Tokyo 113, Japan

• Yasuyuki Egashira

  Department of Chemical Engineering, The University of Tokyo, 7‐3‐1 Hongo, Bunkyo‐ku, Tokyo 113, Japan

• Hiroshi Komiyama

  Department of Chemical Engineering, The University of Tokyo, 7‐3‐1 Hongo, Bunkyo‐ku, Tokyo 113, Japan

収録刊行物

• Journal of The Electrochemical Society

  Journal of The Electrochemical Society 139 (12), 3652-3659, 1992-12-01

  The Electrochemical Society

キーワード

• Materials Chemistry
• Electrochemistry
• Surfaces, Coatings and Films
• Condensed Matter Physics
• Renewable Energy, Sustainability and the Environment
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1363951794384010112
• NII論文ID: 30016161864
• NII書誌ID: AA00697016
• DOI: 10.1149/1.2069138
• ISSN: 19457111
• ISSN: 00134651
• ISSN: http://id.crossref.org/issn/00134651
• Web Site: https://iopscience.iop.org/article/10.1149/1.2069138
• Web Site: https://iopscience.iop.org/article/10.1149/1.2069138/pdf
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