Development of a Pad Conditioning Process for Interlayer Dielectric CMP Using High-Pressure Micro Jet Technology

• Yoshiyuki Seike

• Hyo-sang Lee

• Mineo Takaoka

• Keiji Miyachi

• Masahiko Amari

• Toshiro Doi

• Ara Philipossian

Journal

• Journal of The Electrochemical Society

  Journal of The Electrochemical Society 153 (3), G223-, 2006

  The Electrochemical Society

Keywords

• Materials Chemistry
• Electrochemistry
• Surfaces, Coatings and Films
• Condensed Matter Physics
• Renewable Energy, Sustainability and the Environment
• Electronic, Optical and Magnetic Materials

Details

• CRID: 1360292621444190464
• NII Article ID: 30016169276
• DOI: 10.1149/1.2161667
• ISSN: 00134651
• Web Site: https://syndication.highwire.org/content/doi/10.1149/1.2161667
• Data Source:
  • Crossref
  • CiNii Articles