Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique

• Yongjun Zhao

• Tianhong Cui

収録刊行物

• Journal of Micromechanics and Microengineering

  Journal of Micromechanics and Microengineering 13 (3), 430-435, 2003-03-17

  IOP Publishing

キーワード

• Electrical and Electronic Engineering
• Mechanical Engineering
• Mechanics of Materials
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1360011146170910080
• NII論文ID: 30017863298
• DOI: 10.1088/0960-1317/13/3/312
• ISSN: 09601317
• ISSN: http://id.crossref.org/issn/09601317
• ISSN: http://id.crossref.org/issn/10810595
• データソース種別:
  • Crossref
  • CiNii Articles