Low-resistivity poly-metal gate electrode durable for high-temperature processing

• Y. Akasaka

• S. Suehiro

• K. Nakajima

• T. Nakasugi

• K. Miyano

• K. Kasai

• H. Oyamatsu

• M. Kinugawa

• M.T. Takagi

• K. Agawa

• F. Matsuoka

• M. Kakumu

• K. Suguro

Journal

• IEEE Transactions on Electron Devices

  IEEE Transactions on Electron Devices 43 (11), 1864-1869, 1996

  Institute of Electrical and Electronics Engineers (IEEE)

Keywords

• Electrical and Electronic Engineering
• Electronic, Optical and Magnetic Materials

Details

• CRID: 1361699995383030400
• NII Article ID: 30019644773
• DOI: 10.1109/16.543020
• ISSN: 00189383
• Web Site: http://xplorestaging.ieee.org/ielx1/16/11745/00543020.pdf?arnumber=543020
• Data Source:
  • Crossref
  • CiNii Articles