Comparison of transformation to low-resistivity phase and agglomeration of TiSi/sub 2/ and CoSi/sub 2/

• J.B. Lasky

• J.S. Nakos

• O.J. Cain

• P.J. Geiss

収録刊行物

• IEEE Transactions on Electron Devices

  IEEE Transactions on Electron Devices 38 (2), 262-269, 1991

  Institute of Electrical and Electronics Engineers (IEEE)

キーワード

• Electrical and Electronic Engineering
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1360855569294208000
• NII論文ID: 30019646656
• DOI: 10.1109/16.69904
• ISSN: 00189383
• Web Site: http://xplorestaging.ieee.org/ielx1/16/2451/00069904.pdf?arnumber=69904
• データソース種別:
  • Crossref
  • CiNii Articles