Scaling of Nanocrystal Memory Cell by Direct Tungsten Bitline on Self-Aligned Landing Plug Polysilicon Contact

• I.-G. Kim

• K. Yanagidaira

• T. Hiramoto

収録刊行物

• IEEE Electron Device Letters

  IEEE Electron Device Letters 25 (5), 265-267, 2004-05

  Institute of Electrical and Electronics Engineers (IEEE)

キーワード

• Electrical and Electronic Engineering
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1361137045024016768
• NII論文ID: 30019830586
• DOI: 10.1109/led.2004.826542
• ISSN: 07413106
• Web Site: http://xplorestaging.ieee.org/ielx5/55/28808/01295102.pdf?arnumber=1295102
• データソース種別:
  • Crossref
  • CiNii Articles