Digital chemical vapor deposition and etching technologies for semiconductor processing
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- Y. Horiike
- Department of Electrical Engineering, Hiroshima University, Higashi-Hiroshima 724, Japan
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- T. Tanaka
- Department of Electrical Engineering, Hiroshima University, Higashi-Hiroshima 724, Japan
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- M. Nakano
- Department of Electrical Engineering, Hiroshima University, Higashi-Hiroshima 724, Japan
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- S. Iseda
- Department of Electrical Engineering, Hiroshima University, Higashi-Hiroshima 724, Japan
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- H. Sakaue
- Department of Electrical Engineering, Hiroshima University, Higashi-Hiroshima 724, Japan
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- A. Nagata
- Department of Electrical Engineering, Hiroshima University, Higashi-Hiroshima 724, Japan
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- H. Shindo
- Department of Electrical Engineering, Hiroshima University, Higashi-Hiroshima 724, Japan
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- S. Miyazaki
- Department of Electrical Engineering, Hiroshima University, Higashi-Hiroshima 724, Japan
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- M. Hirose
- Department of Electrical Engineering, Hiroshima University, Higashi-Hiroshima 724, Japan
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抄録
<jats:p>A novel concept on digital chemical vapor deposition (CVD) and etching technologies is described. ArF excimer laser irradiation to a condensed Si2H6 layer on a substrate cooled to −70 °C has resulted in spatially selective poly-Si film growth. The adsorbate thickness control by gas pressure and substrate temperature allows shot by shot atomic layer growth of Si. Digital CVD of SiO2 is also achieved by a repetitive cycles of silane radical deposition and subsequent oxidation. This reaction is promoted by an alternate introduction of pulsed microwave-discharged SiH4 and O2 beams. The deposition species ejected with supersonic velocity into the high vacuum reactor fills SiO2 into a deep trench. Also, digital etching of Si monolayers has been studied for the goal of damage-free etching. A preliminary result obtained by repeating the reaction cycle consisting of adsorption of fluorine atoms on a Si surface cooled to −100 °C and subsequent Ar+ ion irradiation has realized atomic layer etching of Si(100).</jats:p>
収録刊行物
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- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 8 (3), 1844-1850, 1990-05-01
American Vacuum Society
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詳細情報 詳細情報について
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- CRID
- 1362825895164061952
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- NII論文ID
- 30020308367
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- NII書誌ID
- AA10635106
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- DOI
- 10.1116/1.576814
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- ISSN
- 15208559
- 07342101
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- データソース種別
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