Studies of nucleation and growth morphology of boron-doped diamond microcrystals by scanning tunneling microscopy

• M. P. Everson

  Research Staff, Ford Motor Company, SRL P.O. Box 2053, MD 3028, Dearborn, Michigan 48121-2053

• M. A. Tamor

  Research Staff, Ford Motor Company, SRL P.O. Box 2053, MD 3028, Dearborn, Michigan 48121-2053

抄録

We report on a study of nucleation and growth morphology of diamond microcrystals formed by microwave enhanced chemical vapor deposition. By doping diamonds with boron, sufficient conductivity is achieved that they may be directly imaged by scanning tunneling microscopy with near-atomic resolution. We demonstrate the first application of work function and dI/dV imaging of diamond. These techniques offer the ability to identify nuclei too small to be recognized by their characteristic cubo-octahedral shape, and may enable identification of nucleation sites before diamond growth begins.

収録刊行物

• Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

  Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 9 (3), 1570-1576, 1991-05-01

  American Vacuum Society

キーワード

• Electrical and Electronic Engineering
• Condensed Matter Physics

詳細情報

• CRID: 1360299773292009600
• NII論文ID: 30020320870
• NII書誌ID: AA10635106
• DOI: 10.1116/1.585426
• ISSN: 15208567
• ISSN: 10711023
• Web Site: https://pubs.aip.org/avs/jvb/article-pdf/9/3/1570/11468667/1570_1_online.pdf
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