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- Marie Angelopoulos
- IBM Research Division, T. J. Watson Research Center, Yorktown Heights, New York 10598
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- Niranjan Patel
- IBM Technology Products, East Fishkill, New York 12533
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- Jane M. Shaw
- IBM Research Division, T. J. Watson Research Center, Yorktown Heights, New York 10598
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- Nancy C. Labianca
- IBM Research Division, T. J. Watson Research Center, Yorktown Heights, New York 10598
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- Stephen A. Rishton
- IBM Research Division, T. J. Watson Research Center, Yorktown Heights, New York 10598
抄録
<jats:p>A new class of water soluble conducting polyanilines has been developed. This is accomplished by oxidatively polymerizing aniline monomers on a template such as a polymeric acid. The resulting polyanilines readily dissolve in water. These materials can be applied as removable discharge layers for electron-beam lithography and for mask inspection by scanning electron microscopy. They can be spin-applied directly on top of resists without any interfacial problems. Image distortion as a result of charging during resist exposure is not observed with these materials. After exposure the polyaniline is readily and cleanly removed during the resist develop. By incorporating cross-linkable functionality on the polyaniline backbone, water soluble polyanilines that are radiation curable are attained. Upon irradiation these materials cross-link and become insoluble and thus can be utilized as permanent conducting coatings for electrostatic discharge applications. In addition, the cross-linkable polyanilines can be used as water developable conducting resists. 1.0 μm conducting lines have been patterned with electron-beam irradiation.</jats:p>
収録刊行物
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- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 11 (6), 2794-2797, 1993-11-01
American Vacuum Society
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詳細情報
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- CRID
- 1362262945400373248
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- NII論文ID
- 30020321933
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- DOI
- 10.1116/1.586604
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- ISSN
- 15208567
- 10711023
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- データソース種別
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- Crossref
- CiNii Articles