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- Toshinari Ichihashi
- Fundamental and Environmental Research Laboratories, NEC Corporation , 34 Miyukigaoka, Tsukuba 305-8501, Japan and , Kawaguchi Center Building, 4-1-8 Hon-cho, Kawaguchi 332-0012, Japan
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- Masahiko Ishida
- Fundamental and Environmental Research Laboratories, NEC Corporation , 34 Miyukigaoka, Tsukuba 305-8501, Japan and , Kawaguchi Center Building, 4-1-8 Hon-cho, Kawaguchi 332-0012, Japan
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- Yukinori Ochiai
- Fundamental and Environmental Research Laboratories, NEC Corporation , 34 Miyukigaoka, Tsukuba 305-8501, Japan and , Kawaguchi Center Building, 4-1-8 Hon-cho, Kawaguchi 332-0012, Japan
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- Jun-ichi Fujita
- Institute of Applied Physics, University of Tsukuba , 1-1-1 Tennoudai, Tsukuba 305-8573, Japan and , Kawaguchi Center Building, 4-1-8 Hon-cho, Kawaguchi 332-0012, Japan
抄録
<jats:p>We observed the tubulization process of amorphous carbon nanopillars using an in situ transmission electron microscopy. Amorphous carbon nanopillars were grown by electron-beam-induced chemical vapor deposition on an iron-doped carbon foundation. Amorphous carbon nanopillars were transformed into graphitic tubules by annealing at about 650°C in the presence of iron nanoparticles supplied from the iron-doped carbon foundation. A molten catalyst nanoparticle penetrated an amorphous carbon nanopillar, dissolving it and leaving a graphite track behind. This graphitic nanotube synthesis technique using nanofabrication promises to bring about a great advance in nanotube electronic devices.</jats:p>
収録刊行物
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- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 22 (6), 3221-3223, 2004-11-01
American Vacuum Society
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詳細情報
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- CRID
- 1360574094773095168
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- NII論文ID
- 30020324524
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- ISSN
- 15208567
- 10711023
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- データソース種別
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