The Effect of Substrate Temperature on the Structure of Titanium Carbide Deposited by Activated Reactive Evaporation

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  • A. C. Raghuram
    Materials Department, School of Engineering and Applied Science, University of California, Los Angeles, California 90024
  • R. F. Bunshah
    Materials Department, School of Engineering and Applied Science, University of California, Los Angeles, California 90024

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<jats:p>A change in substrate temperature produces a marked change in the microstructure, preferred orientation, and microhardness of TiC deposits. At low temperatures (∼500 °C) the structure consists of tapered crystallites and changes to a structure consisting of columnar grains at the higher temperatures (∼1000 °C). The high temperature deposits exhibit very high microhardness values (∼4500–5000 kg/mm2 KHN).</jats:p>

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