Atomic Resolution of the Silicon (111)-(7×7) Surface by Atomic Force Microscopy

DOI Web Site 被引用文献170件
  • Franz J. Giessibl
    Park Scientific Instruments, 1171 Borregas Avenue, Sunnyvale, CA 94089, USA.

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<jats:p>Achieving high resolution under ultrahigh-vacuum conditions with the force microscope can be difficult for reactive surfaces, where the interaction forces between the tip and the samples can be relatively large. A force detection scheme that makes use of a modified cantilever beam and senses the force gradient through frequency modulation is described. The reconstructed silicon (111)-(7×7) surface was imaged in a noncontact mode by force microscopy with atomic resolution (6 angstroms lateral, 0.1 angstrom vertical).</jats:p>

収録刊行物

  • Science

    Science 267 (5194), 68-71, 1995-01-06

    American Association for the Advancement of Science (AAAS)

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