Phenomenological Interpretation of Excimer Laser Ablation of Single-Crystal Oxides (MgO, SrTiO<sub>3</sub> and LaAlO<sub>3</sub>)

DOI Web Site Web Site 被引用文献6件 参考文献10件
  • Ishibashi Hiroshige
    Faculty of Engineering Science, Osaka University, 1–3 Machikaneyama, Toyonaka, Osaka 560
  • Arisaka Syuji
    Faculty of Engineering Science, Osaka University, 1–3 Machikaneyama, Toyonaka, Osaka 560
  • Kinoshita Kazuya
    Faculty of Engineering Science, Osaka University, 1–3 Machikaneyama, Toyonaka, Osaka 560
  • Kobayashi Takeshi
    Faculty of Engineering Science, Osaka University, 1–3 Machikaneyama, Toyonaka, Osaka 560

書誌事項

タイトル別名
  • Phenomenological Interpretation of Excimer Laser Ablation of Single-Crystal Oxides (MgO, SrTiO3 and LaAl03).

この論文をさがす

抄録

ArF excimer laser ablation of single-crystal oxide surfaces was investigated experimentally and theoretically. All specimens (MgO, SrTiO3 and LaAlO3) showed the presence of the threshold laser fluence for the ablation, possibly suggesting a thermal process. With increase in the fluence, etching rate increased sublinearly (downward bowing), and with further increase in the fluence, it increased almost linearly. To interpret the ablation mechanism and this nonlinearity, we proposed the ablation model, imposing two factors (effects of laser recoil pressure and optical reflection by the surface molten layer) to a previous dynamical model. Our proposed model explained the results well, and it was found that surface reflection by the molten layer is mainly responsible for the nonlinearity.

収録刊行物

被引用文献 (6)*注記

もっと見る

参考文献 (10)*注記

もっと見る

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ