Preparation and Properties of Ru and RuO<sub>2</sub> Thin Film Electrodes for Ferroelectric Thin Films
-
- Maiwa Hiroshi
- Department of Materials Science and Ceramic Technology, Faculty of Engineering, Shonan Institute of Technology, 1–1–25 Tsujido–Nishikaigan, Fujisawa, Kanagawa 251
-
- Ichinose Noboru
- Department of Materials Science and Engineering, School of Science and Engineering, Waseda University, 3–4–1 Okubo, Shinjuku–ku, Tokyo 169
-
- Okazaki Kiyoshi
- Department of Materials Science and Ceramic Technology, Faculty of Engineering, Shonan Institute of Technology, 1–1–25 Tsujido–Nishikaigan, Fujisawa, Kanagawa 251
書誌事項
- タイトル別名
-
- Preparation and Properties of Ru and RuO2 Thin Film Electrodes for Ferroelectric Thin Films.
この論文をさがす
抄録
Ru and RuO2 thin films were prepared by RF magnetron sputtering. The crystalline structure and electrical properties of these films were investigated. Reactive sputtering of a ruthenium metal target was carried out in a mixed gas of argon and oxygen at 580° C. Total pressure (P O<SUB>2</SUB>+P Ar) was controlled to maintain a constant pressure of 1 Pa. The RuO2 single phase could be obtained when P O<SUB>2</SUB> was 0.5 Pa and the deposition rate was about 30 nm/min. The resistivity of the 290 nm-thick RuO2 thin films deposited on SiO2(1000 nm)/Si was 54.9 µ Ω· cm. However, the resistivity increased with decreasing film thickness. Fatigue resistance of (Pb, La)TiO3 thin films with RuO2 as top and bottom electrodes was improved compared to the films on Pt electrodes.
収録刊行物
-
- Japanese Journal of Applied Physics
-
Japanese Journal of Applied Physics 33 (9B), 5223-5226, 1994
The Japan Society of Applied Physics
- Tweet
キーワード
詳細情報 詳細情報について
-
- CRID
- 1390001206245664128
-
- NII論文ID
- 110003903943
- 30021820691
- 210000035955
-
- NII書誌ID
- AA10457675
-
- COI
- 1:CAS:528:DyaK2cXntFegt70%3D
-
- ISSN
- 13474065
- 00214922
-
- 本文言語コード
- en
-
- データソース種別
-
- JaLC
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可