Methodology for Accurate Oxygen Distribution Analysis and Its Application to YBa<sub>2</sub>Cu<sub>3</sub>O<sub>x</sub> Thin Films Using <sup>16</sup>O(α, α)<sup>16</sup>O 3.045 MeV Resonance Reaction
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- Watamori Michio
- Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2–1 Yamadaoka, Suita, Osaka 565
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- Shoji Fumiya
- Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2–1 Yamadaoka, Suita, Osaka 565
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- Oura Kenjiro
- Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2–1 Yamadaoka, Suita, Osaka 565
書誌事項
- タイトル別名
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- Methodology for Accurate Oxygen Distribution Analysis and Its Application to YBa2Cu3Ox Thin Films Using 16O(α, α)16O 3.045 MeV Resonance Reaction
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抄録
The enhancement factor of oxygen of 16O(α, α)16O resonance for a Rutherford backscattering cross section has been investigated using SiO2 films of various thicknesses. A new procedure to accurately extract the resonant oxygen height from a raw spectrum has been proposed. With this procedure, the dependence between the film thicknesses and resonant signals has been investigated, and was found to agree well with a computer simulation within experimental error. Using the enhancement factor, the depth dependence of oxygen concentration in the YBa2Cu3O x/MgO systems has been estimated accurately. Estimations of the accuracy of elastic backscattering analysis are also given.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 33 (10A), 6039-6045, 1994
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390282681248548096
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- NII論文ID
- 110003903491
- 30021821061
- 210000036142
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- NII書誌ID
- AA10457675
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- COI
- 1:CAS:528:DyaK2MXhslKmt7g%3D
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- ISSN
- 13474065
- 00214922
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- 本文言語コード
- en
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- データソース種別
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- JaLC
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- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可