Methodology for Accurate Oxygen Distribution Analysis and Its Application to YBa<sub>2</sub>Cu<sub>3</sub>O<sub>x</sub> Thin Films Using <sup>16</sup>O(α, α)<sup>16</sup>O 3.045 MeV Resonance Reaction

  • Watamori Michio
    Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2–1 Yamadaoka, Suita, Osaka 565
  • Shoji Fumiya
    Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2–1 Yamadaoka, Suita, Osaka 565
  • Oura Kenjiro
    Department of Electronic Engineering, Faculty of Engineering, Osaka University, 2–1 Yamadaoka, Suita, Osaka 565

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  • Methodology for Accurate Oxygen Distribution Analysis and Its Application to YBa2Cu3Ox Thin Films Using 16O(α, α)16O 3.045 MeV Resonance Reaction

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The enhancement factor of oxygen of 16O(α, α)16O resonance for a Rutherford backscattering cross section has been investigated using SiO2 films of various thicknesses. A new procedure to accurately extract the resonant oxygen height from a raw spectrum has been proposed. With this procedure, the dependence between the film thicknesses and resonant signals has been investigated, and was found to agree well with a computer simulation within experimental error. Using the enhancement factor, the depth dependence of oxygen concentration in the YBa2Cu3O x/MgO systems has been estimated accurately. Estimations of the accuracy of elastic backscattering analysis are also given.

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