Underwater Performance of Flexible Microgripper and Fine Particle Manipulation

  • Suzuki Yoshihiko
    Central Research Laboratory, Nikon Corporation, 1–6–3 Nishi–Ohi, Shinagawa–ku, Tokyo 140

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Underwater performance of the microfabricated flexible microgripper (FMG) using Lorentz force actuation and electrothermal bimorph actuation is presented here. The Lorentz force actuation was a primary factor of the actuation for the underwater operation of FMG. We have manipulated the polystyrene fine particles successfully by using the FMG in water.

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