Propagation Characteristics of Surface Acoustic Waves in KNbO₃/SrTiO₃/Si Layered Structures

• Wu Mu–Shiang

  Department of Electrical Engineering, Tatung Institute of Technology, Taipei 104, Taiwan, Republic of China

• Shih Wen–Ching

  Department of Electrical Engineering, Tatung Institute of Technology, Taipei 104, Taiwan, Republic of China

書誌事項

タイトル別名

• Propagation Characteristics of Surface Acoustic Waves in KNbO3/SrTiO3/Si Layered Structures.

抄録

The propagation characteristics of surface acoustic waves (SAWs) in KNObO₃/SrTiO₃/Si structures were investigated theoretically. Phase velocities (v _p) decrease when the hK value of the SrTiO₃ buffer layer increases from 0.04 to 0.2 for a specified thickness of the KNbO₃ film. The value of the coupling coefficient (K²) can be as high as 10%. A layered structure with the interdigital transducer (IDT) located on top of the KNbO₃ film is a better choice for device fabrication if we select a coupling coefficient of 1% as a reference for comparison. The results could provide useful information for combining optical devices, semiconductor devices and SAW devices on the same Si substrate.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 36 (4A), 2192-2195, 1997

  The Japan Society of Applied Physics

キーワード

• surface acoustic wave (SAW)
• KNbO<SUB> 3</SUB> thin films
• SrTiO<SUB> 3</SUB> buffer layer
• Si substrate
• phase velocity
• electromechanical coupling coefficient

詳細情報

• CRID: 1390001206249942528
• NII論文ID: 30021824629
• NII論文ID: 130004523623
• NII論文ID: 210000040950
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.36.2192
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.36.2192
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.36.2192/pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可