Octahedral Void Structure Observed in Grown-In Defects in the Bulk of Standard Czochralski-Si for MOS LSIs.
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- Ueki Takemi
- NTT Electronics Technology Corp., Atsugi–Shi, Kanagawa Pref. 243–01, Japan
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- Itsumi Manabu
- System Electronics Laboratories, NTT, Atsugi–Shi, Kanagawa Pref. 243–01, Japan
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- Takeda Tadao
- System Electronics Laboratories, NTT, Atsugi–Shi, Kanagawa Pref. 243–01, Japan
書誌事項
- タイトル別名
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- Octahedral Void Structure Observed in G
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We analyzed the structure of octahedral voids in the bulk of standard silicon wafers. They are often twin type and are about 100 nm in size. The structure of the defect is incompletely octahedron, and is mainly surrounded by { 111 } planes. Our electron diffraction and energy-dispersive X-ray spectroscopy analyses suggest that the octahedron defect is void. A 2-nm-thick layer exists on each of the side walls of the void defect. Our auger electron spectroscopy analysis suggests that the 2-nm-thick layer is SiO2. It is believed that the void structure is formed during Si-ingot growth.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 36 (3B), 1781-1785, 1997
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390001206247712640
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- NII論文ID
- 110003946885
- 30021829757
- 210000040861
- 130004523612
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- NII書誌ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 4196710
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
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