Nanofabrication of Titanium Surface by Tip-Induced Anodization in Scanning Tunneling Microscopy

• Hiroyuki Sugimura

• Tatsuya Uchida

• Noboru Kitamura Noboru Kitamura

• Hiroshi Masuhara Hiroshi Masuhara

抄録

A titanium (Ti) surface was arbitrarily oxidized by a scanning tunneling microscope (STM). Oxidation of the Ti surface was induced by scanning an STM tip with the sample (Ti) bias of more than +3 V, and a dot or line pattern of oxide was fabricated on Ti with the spatial resolution of 70 nm. The results were discussed in terms of tip-induced anodization of Ti due to water adsorbed on the surface.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 32 (4A), L553-, 1993-04-01

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360284921819015040
• NII論文ID: 30021862419
• NII論文ID: 210000034897
• DOI: 10.1143/jjap.32.l553
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.32.L553
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.32.L553/pdf
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