Analysis of Bending Displacement of Lead Zirconate Titanate Thin Film Synthesized by Hydrothermal Method

• Yoko Ohba

• Masahiro Miyauchi

• Takaaki Tsurumi Takaaki Tsurumi

• Masaki Daimon Masaki Daimon

抄録

Lead zirconate titanate solid-solution (PZT) films with various thicknesses were synthesized on titanium substrates by repeated hydrothermal treatments. Young's modulus and the density of the PZT film were measured by the vibrating-reed technique and Archimedes' method, respectively, and they were lower than those of PZT ceramic. We fabricated bimorph-type bending actuators using those films and analyzed the displacement induced by the electric field. It was found that the piezoelectric constant and electromechanical coupling factor of the PZT film were comparable to those of the ceramic, and also that the displacement was caused by the piezoelectric effect. The actuators were bent by applied voltage without poling, because the polar axes in the as-deposited film were aligned in the direction from the film surface to the substrate.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 32 (9S), 4095-, 1993-09-01

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360003446841943040
• NII論文ID: 30021863182
• NII論文ID: 210000033922
• NII書誌ID: AA10457675
• DOI: 10.1143/jjap.32.4095
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• ISSN: http://id.crossref.org/issn/00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.32.4095
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.32.4095/pdf
• データソース種別:
  • Crossref
  • CiNii Articles