Ozone oxidation of silicon

• A. Kazor

• I.W. Boyd

収録刊行物

• Electronics Letters

  Electronics Letters 29 (1), 115-116, 1993-01-07

  Institution of Engineering and Technology (IET)

キーワード

• Electrical and Electronic Engineering

詳細情報

• CRID: 1360574096548059648
• NII論文ID: 30026866344
• NII書誌ID: AA00633749
• DOI: 10.1049/el:19930075
• ISSN: 1350911X
• Web Site: https://digital-library.theiet.org/content/journals/10.1049/el_19930075?crawler=true&mimetype=application/pdf
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