Secondary Phase Formation and Microstructural Development in the Interaction Between SrBi₂Ta₂O₉ Films and Pt/Ti/SiO₂/Si Substrates

• Chung-Hsin Lu

• Buh-Kuan Fang

抄録

The phase formation and microstructural development of SrBi 2 Ta 2 O 9 thin films prepared via spin-coating using metalorganic solution on Pt/Ti/SiO 2 /Si substrates have been investigated in this study. The spun-on films started to crystallize from above 550 °C and were well crystallized at 800 °C. At higher than 850 °C a secondary phase having a pyrochlore structure was formed in the films. The analysis of EDS and SIMS confirmed that the interaction between the films and the titanium species which diffused outward from the titanium layer on substrates was the origin for the occurrence of the pyrochlore phase. In addition, varying the thickness of the coated films and platinum layers had remarkable influence on the formation amount of the pyrochlore phase.

収録刊行物

• Journal of Materials Research

  Journal of Materials Research 12 (8), 2104-2110, 1997-08

  Springer Science and Business Media LLC

キーワード

• Mechanical Engineering
• Mechanics of Materials
• Condensed Matter Physics
• General Materials Science

詳細情報

• CRID: 1360579819048287232
• NII論文ID: 30035468166
• DOI: 10.1557/jmr.1997.0282
• ISSN: 20445326
• ISSN: 08842914
• Web Site: https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S0884291400040772
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