Growth structure of yttria-stabilized-zirconia films during off-normal ion-beam-assisted deposition
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<jats:p>Biaxially aligned YSZ thin films with strong [100] fiber texture were formed on a polycrystalline Ni-based alloy by off-normal ion-beam-assisted deposition. Growth structures were characterized by x-ray diffraction (XRD), transmission electron microscopy (TEM), atomic force microscopy (AFM), etc., and the alignment mechanism was discussed using a selective growth model. Peculiar structural evolution of the crystalline orientation was observed and its development was well described by an exponential equation. It was explained as a collaboration of an anisotropic growth condition and epitaxial crystallization. The [100] fiber texture was formed by columnar structures of diameter of 30–100 nm, which were composed of 5–10 nm diameter crystallites. Very smooth surfaces were observed by AFM imaging with a roughness of 2–3 nm and a peculiar ripple structure. The origin of the azimuthal alignment was discussed with emphasis on the surface structure of YSZ films produced using ion-beam-assisted deposition (IBAD) and the etching rate measurements of (100) surfaces of YSZ single crystals.</jats:p>
収録刊行物
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- Journal of Materials Research
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Journal of Materials Research 13 (11), 3106-3113, 1998-11
Springer Science and Business Media LLC
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詳細情報 詳細情報について
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- CRID
- 1360298340745694976
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- NII論文ID
- 30035470724
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- ISSN
- 20445326
- 08842914
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- データソース種別
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