多相構造を有する銅アセチルアセトナートプラズマ重合膜の電気特性

書誌事項

タイトル別名
  • Electronic properties of plasma-polymerized copper acetylacetonate thin films with a higher-ordered structure.
  • タソウ コウゾウ オ ユウスル ドウ アセチルアセトナート プラズマ ジュウゴ

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抄録

Plasma-polymerized copper acetylacetonate (CuAA) thin films prepared under various plasma conditionsand various temperatures exhibited a wide range of electric conductivities from 10-10 to 104 S/cm. The colorand appearance of the films changed from transparent colorless, yellow, green to blue or red with an increasein conductivity. The conductivity of plasma-polymerized CuAA films increased abruptly from 10-2 to 104S/cm under certain conditions; these phenomena are discussed in terms of the formation of a higher-orderedstructure. It was found that the films with conductivities in the range from 10-5 to 10-2 S/cm showednegative resistance, switching and photoconductivity. An electron beam patterning was also performedon the plasma-polymerized CuAA films with this range of conductivities.

収録刊行物

  • 高分子論文集

    高分子論文集 44 (4), 275-280, 1987

    公益社団法人 高分子学会

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