無変形冷凍ピンチャックの開発 (第2報)

DOI Web Site 被引用文献1件 参考文献2件

書誌事項

タイトル別名
  • Development of a Nondeforming Freezing Pin Chuck (2nd Report)
  • 無変形冷凍ピンチャックの開発(第2報)ピン上への冷凍液塗布法と塗布特性
  • ムヘンケイ レイトウ ピンチャック ノ カイハツ ダイ2ホウ ピン ジョウ エ ノ レイトウエキ トフホウ ト トフ トクセイ
  • —Application Method and Characteristics of Freezing Liquid on Pins—
  • —ピン上への冷凍液塗布法と塗布特性—

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抄録

Large quartz masks require a flatness tolerance of 10 μm to transfer fine patterns; however, these masks typically have a warp range of 10 to 100 μm. Fabricating a nonwarped mask is difficult because, during the polishing process, the mask substrate cannot be held without deformation. Therefore, a nondeforming freezing pin chuck has been developed. This paper describes a new application method and the resulting characteristics of the freezing liquid droplets. An oil-repellent coating and a newly developed low-speed spraying method were used to make a spherical droplet on a pin. The evaporation times of freezing liquid and water droplets on a 0.5-mm-diameter pin are the same (about 200 sec) despite the difference in volume, because the water droplet has a significantly larger surface area. After the oil-repellent coating was applied, the contact angle of the freezing liquid droplet increased from about 40° to about 120°, and the height increased from 65 to over 300 μm; likewise, the contact angle of the water droplet increased from about 130° to about 160°, and the height increased from 400 to over 1000 μm. When combined with the oil-repellent coating, the new low-speed spraying method yielded a freezing liquid droplet with a height of over 200 μm on a 0.5-mm-diameter pin — more than three times the height generated before the oil-repellent coating was applied.

収録刊行物

  • 精密工学会誌

    精密工学会誌 77 (10), 972-976, 2011

    公益社団法人 精密工学会

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