Pattern Transfer Characterization after Double-Level Lithography for a Fabrication of the Three-Dimensional Aluminum Titanium Carbide Air Bearing Surface of the Hard Disk Slider

• Patama Pholprasit

• Nithi Atthi

• Thawat Thammabut

書誌事項

タイトル別名

• Special Issue : Microprocesses and Nanotechnology

収録刊行物

• Japanese journal of applied physics : JJAP

  Japanese journal of applied physics : JJAP 51 (6), 2012-06

  Tokyo : The Japan Society of Applied Physics

詳細情報

• CRID: 1520290882101604096
• NII論文ID: 40019317316
• NII書誌ID: AA12295836
• ISSN: 00214922
• NDL書誌ID: 023762505
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I023762505
• 本文言語コード: en
• NDL 雑誌分類:
  • ZM35(科学技術--物理学)
• データソース種別:
  • NDL
  • CiNii Articles