Structure and properties of a-Si : H films prepared at high-deposition rate 高速堆積a-Si : H膜の構造と特性

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Author

    • 上田, 将人 ウエダ, マサト

Bibliographic Information

Title

Structure and properties of a-Si : H films prepared at high-deposition rate

Other Title

高速堆積a-Si : H膜の構造と特性

Author

上田, 将人

Author(Another name)

ウエダ, マサト

University

広島大学

Types of degree

工学博士

Grant ID

甲第637号

Degree year

1987-03-24

Note and Description

博士論文

Table of Contents

  1. 目次 (7コマ目)
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Codes

  • NII Article ID (NAID)
    500000012750
  • NII Author ID (NRID)
    • 8000000012757
  • DOI(NDL)
  • NDLBibID
    • 000000177064
  • Source
    • NDL ONLINE
    • NDL Digital Collections

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