Fundamental studies on the interactions of kV electrons with solids for applications to electron spectroscopies 電子分光法におけるkV電子と固体との相互作用に関する基礎的研究

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著者

    • 丁, 澤軍 ディン, ツェジュン

書誌事項

タイトル

Fundamental studies on the interactions of kV electrons with solids for applications to electron spectroscopies

タイトル別名

電子分光法におけるkV電子と固体との相互作用に関する基礎的研究

著者名

丁, 澤軍

著者別名

ディン, ツェジュン

学位授与大学

大阪大学

取得学位

工学博士

学位授与番号

乙第5163号

学位授与年月日

1990-10-29

注記・抄録

博士論文

09380

博士(工学)

1990-10-29

大阪大学

14401乙第05163号

目次

  1. CONTENTS / p5 (0005.jp2)
  2. List of Acronyms / p8 (0007.jp2)
  3. Preface and Acknowledgments / p9 (0007.jp2)
  4. 1. Introduction / p1 (0009.jp2)
  5. §1.1 Electron Spectroscopies for Surface Analysis / p1 (0009.jp2)
  6. §1.2 Electron-Solid Interactions / p7 (0012.jp2)
  7. 2. Theory of Electron Scattering / p15 (0016.jp2)
  8. §2.1 Calculation of Elastic Cross-Sections / p15 (0016.jp2)
  9. §2.2 Inelastic Scattering / p29 (0023.jp2)
  10. 3. Monte Carlo Simulation / p66 (0042.jp2)
  11. §3.1 Principles / p66 (0042.jp2)
  12. §3.2 Models / p68 (0043.jp2)
  13. §3.3 Procedures / p72 (0045.jp2)
  14. 4. Application of Monte Carlo Simulation I. / p82 (0050.jp2)
  15. (Backscattering Factors for Quantitative Auger Analysis) / p82 (0050.jp2)
  16. §4.1 Formalisms of Quantitative Analysis by Auger Electron Spectroscopy / p82 (0050.jp2)
  17. §4.2 Backscattering Factors for Au-Cu Alloy / p85 (0051.jp2)
  18. §4.3 Estimation of Background in Auger Electron Spectroscopy / p95 (0056.jp2)
  19. 5. Application of Monte Carlo Simulation II. / p105 (0061.jp2)
  20. (Generation of Secondary Electrons) / p105 (0061.jp2)
  21. §5.1 Secondary Electron Emission / p105 (0061.jp2)
  22. §5.2 Monte Carlo Calculations / p109 (0063.jp2)
  23. §5.3 Ultimate Resolution of Scanning Electron Microscopy / p113 (0065.jp2)
  24. 6. Application of Monte Carlo Simulation III. / p126 (0072.jp2)
  25. (Escape Depth and Attenuation Length) / p126 (0072.jp2)
  26. §6.1 Introduction / p126 (0072.jp2)
  27. §6.2 Assessment of Escape Depth and Attenuation Length without Elastic Scattering / p129 (0073.jp2)
  28. §6.3 Correction Factor for Escape Depth in Quantitative Auger Analysis / p137 (0077.jp2)
  29. §6.4 Estimation of Attenuation Length / p145 (0081.jp2)
  30. 7. Angular-Energy Distribution of Backscattered Electrons / p149 (0083.jp2)
  31. §7.1 Introduction / p149 (0083.jp2)
  32. §7.2 Construction of Experimental Apparatus / p151 (0084.jp2)
  33. §7.3 Performance of Measuring System / p155 (0086.jp2)
  34. §7.4 Measurements of Angular Distribution / p156 (0087.jp2)
  35. §7.5 Comparison with Calculations / p163 (0090.jp2)
  36. §7.6 Angular Resolved Energy Distribution / p169 (0093.jp2)
  37. 8. Summary / p171 (0094.jp2)
  38. Appendices / p175 (0096.jp2)
  39. §A. Mott Cross-Sections / p175 (0096.jp2)
  40. §B. Expansion of Radial Functions / p181 (0099.jp2)
  41. §C. Atomic Potentials / p184 (0101.jp2)
  42. §D. Born Approximation / p188 (0103.jp2)
  43. §E. Dielectric Approach / p191 (0104.jp2)
  44. §F. Coordinate Transformations / p197 (0107.jp2)
  45. §G. Angular Distribution / p200 (0109.jp2)
  46. §H. Detection Solid Angles for Cylindrical Mirror Analyzer / p202 (0110.jp2)
  47. §I. Integrals / p204 (0111.jp2)
  48. References / p209 (0113.jp2)
  49. List of Publications / p218 (0118.jp2)
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各種コード

  • NII論文ID(NAID)
    500000072617
  • NII著者ID(NRID)
    • 8000000072812
  • DOI(NDL)
  • NDL書誌ID
    • 000000236931
  • データ提供元
    • 機関リポジトリ
    • NDL-OPAC
    • NDLデジタルコレクション
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