Fundamental studies on the interactions of kV electrons with solids for applications to electron spectroscopies 電子分光法におけるkV電子と固体との相互作用に関する基礎的研究
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Bibliographic Information
- Title
-
Fundamental studies on the interactions of kV electrons with solids for applications to electron spectroscopies
- Other Title
-
電子分光法におけるkV電子と固体との相互作用に関する基礎的研究
- Author
-
丁, 澤軍
- Author(Another name)
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ディン, ツェジュン
- University
-
大阪大学
- Types of degree
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工学博士
- Grant ID
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乙第5163号
- Degree year
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1990-10-29
Note and Description
博士論文
Table of Contents
- CONTENTS / p5 (0005.jp2)
- List of Acronyms / p8 (0007.jp2)
- Preface and Acknowledgments / p9 (0007.jp2)
- 1. Introduction / p1 (0009.jp2)
- §1.1 Electron Spectroscopies for Surface Analysis / p1 (0009.jp2)
- §1.2 Electron-Solid Interactions / p7 (0012.jp2)
- 2. Theory of Electron Scattering / p15 (0016.jp2)
- §2.1 Calculation of Elastic Cross-Sections / p15 (0016.jp2)
- §2.2 Inelastic Scattering / p29 (0023.jp2)
- 3. Monte Carlo Simulation / p66 (0042.jp2)
- §3.1 Principles / p66 (0042.jp2)
- §3.2 Models / p68 (0043.jp2)
- §3.3 Procedures / p72 (0045.jp2)
- 4. Application of Monte Carlo Simulation I. / p82 (0050.jp2)
- (Backscattering Factors for Quantitative Auger Analysis) / p82 (0050.jp2)
- §4.1 Formalisms of Quantitative Analysis by Auger Electron Spectroscopy / p82 (0050.jp2)
- §4.2 Backscattering Factors for Au-Cu Alloy / p85 (0051.jp2)
- §4.3 Estimation of Background in Auger Electron Spectroscopy / p95 (0056.jp2)
- 5. Application of Monte Carlo Simulation II. / p105 (0061.jp2)
- (Generation of Secondary Electrons) / p105 (0061.jp2)
- §5.1 Secondary Electron Emission / p105 (0061.jp2)
- §5.2 Monte Carlo Calculations / p109 (0063.jp2)
- §5.3 Ultimate Resolution of Scanning Electron Microscopy / p113 (0065.jp2)
- 6. Application of Monte Carlo Simulation III. / p126 (0072.jp2)
- (Escape Depth and Attenuation Length) / p126 (0072.jp2)
- §6.1 Introduction / p126 (0072.jp2)
- §6.2 Assessment of Escape Depth and Attenuation Length without Elastic Scattering / p129 (0073.jp2)
- §6.3 Correction Factor for Escape Depth in Quantitative Auger Analysis / p137 (0077.jp2)
- §6.4 Estimation of Attenuation Length / p145 (0081.jp2)
- 7. Angular-Energy Distribution of Backscattered Electrons / p149 (0083.jp2)
- §7.1 Introduction / p149 (0083.jp2)
- §7.2 Construction of Experimental Apparatus / p151 (0084.jp2)
- §7.3 Performance of Measuring System / p155 (0086.jp2)
- §7.4 Measurements of Angular Distribution / p156 (0087.jp2)
- §7.5 Comparison with Calculations / p163 (0090.jp2)
- §7.6 Angular Resolved Energy Distribution / p169 (0093.jp2)
- 8. Summary / p171 (0094.jp2)
- Appendices / p175 (0096.jp2)
- §A. Mott Cross-Sections / p175 (0096.jp2)
- §B. Expansion of Radial Functions / p181 (0099.jp2)
- §C. Atomic Potentials / p184 (0101.jp2)
- §D. Born Approximation / p188 (0103.jp2)
- §E. Dielectric Approach / p191 (0104.jp2)
- §F. Coordinate Transformations / p197 (0107.jp2)
- §G. Angular Distribution / p200 (0109.jp2)
- §H. Detection Solid Angles for Cylindrical Mirror Analyzer / p202 (0110.jp2)
- §I. Integrals / p204 (0111.jp2)
- References / p209 (0113.jp2)
- List of Publications / p218 (0118.jp2)