Studies on electron impact excitation of the group Ⅳ hydride molecules used in plasma processing プラズマプロセシング用Ⅳ族水素化物分子の電子衝突励起に関する研究

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Author

    • Kyaw, Tint チョウ, ティン

Bibliographic Information

Title

Studies on electron impact excitation of the group Ⅳ hydride molecules used in plasma processing

Other Title

プラズマプロセシング用Ⅳ族水素化物分子の電子衝突励起に関する研究

Author

Kyaw, Tint

Author(Another name)

チョウ, ティン

University

名古屋大学

Types of degree

工学博士

Grant ID

甲第2385号

Degree year

1990-12-15

Note and Description

博士論文

Table of Contents

  1. Contents / p1 (0004.jp2)
  2. Chapter1. Introduction / p1 (0007.jp2)
  3. 1.1 Understanding of the Plasma Process / p1 (0007.jp2)
  4. 1.2 Optical Emission Spectroscopy / p4 (0010.jp2)
  5. 1.3 Studies on Fundamental Processes / p7 (0013.jp2)
  6. 1.4 Purpose and Composition of the Dissertation / p10 (0016.jp2)
  7. References for Chapter 1 / p12 (0018.jp2)
  8. Chapter2. Emission Cross Sections of the Fragments in Dissociative Excitation of Germane by Electron Impact / p16 (0022.jp2)
  9. 2.1 Introduction / p16 (0022.jp2)
  10. 2.2 Experimental Method / p17 (0023.jp2)
  11. 2.3 Results and Discussion / p19 (0025.jp2)
  12. 2.4 Summary / p34 (0040.jp2)
  13. References for Chapter2 / p35 (0041.jp2)
  14. Chapter3. Level Excitation Cross Sections of Atomic Fragments in Low-Energy Electron Impact Dissociation of Group IV Hydrides / p36 (0042.jp2)
  15. 3.1 Introduction / p36 (0042.jp2)
  16. 3.2 Experimental Method / p37 (0043.jp2)
  17. 3.3 Data Analysis / p39 (0045.jp2)
  18. 3.4 Results / p41 (0047.jp2)
  19. 3.5 Discussion / p49 (0055.jp2)
  20. 3.6 Summary / p51 (0057.jp2)
  21. References for Chapter3 / p52 (0058.jp2)
  22. Chapter4. Lifetimes of Neutral and and Singly-Ionized Germanium / p54 (0060.jp2)
  23. 4.1 Introduction / p54 (0060.jp2)
  24. 4.2 Experimental Method and Data Analysis / p56 (0062.jp2)
  25. 4.3 Results and Discussion / p59 (0065.jp2)
  26. 4.4 Summary / p65 (0071.jp2)
  27. References for Chapter4 / p66 (0072.jp2)
  28. Chapter5. Conclusion / p68 (0074.jp2)
  29. Appendix A / p72 (0078.jp2)
  30. The Expression for the Optical Emission Cross Section in Terms of Measurable Quantities / p72 (0078.jp2)
  31. Appendix B / p75 (0081.jp2)
  32. Level Excitation Cross Section and Cascade Contribution in the Atomic Emission Induced by Electron Impact Dissociation of Molecules / p75 (0081.jp2)
  33. Appendix C / p82 (0088.jp2)
  34. Calculation of the Ge ɪ Lifetimes Using the LS-Coupling Scheme Formulae / p82 (0088.jp2)
  35. Papers Concerned with this Dissertation / p86 (0092.jp2)
  36. Acknowledgments / p89 (0095.jp2)
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Codes

  • NII Article ID (NAID)
    500000073362
  • NII Author ID (NRID)
    • 8000000073558
  • DOI(NDL)
  • NDLBibID
    • 000000237676
  • Source
    • NDL ONLINE
    • NDL Digital Collections

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