Laser-induced microprocessing of Mn-Zn ferrite レーザープロセッシングによるMn-Znフェライト超微細加工

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Author

    • 陸, 永楓 ルウ, ヨンフォン

Bibliographic Information

Title

Laser-induced microprocessing of Mn-Zn ferrite

Other Title

レーザープロセッシングによるMn-Znフェライト超微細加工

Author

陸, 永楓

Author(Another name)

ルウ, ヨンフォン

University

大阪大学

Types of degree

工学博士

Grant ID

甲第4371号

Degree year

1991-03-26

Note and Description

博士論文

Table of Contents

  1. CONTENT / (0004.jp2)
  2. ABSTRACT / (0003.jp2)
  3. Chapter 1. PREFACE / p1 (0006.jp2)
  4. 1-1. Background of This Study / p1 (0006.jp2)
  5. 1-2. Laser-Induced Microprocessing / p4 (0008.jp2)
  6. 1-3. Outline of Thesis / p6 (0009.jp2)
  7. Chapter 2 . THEORY AND EXPERIMENTAL / p8 (0010.jp2)
  8. 2-1. Laser Beam-Induced Temperature Rise / p8 (0010.jp2)
  9. 2-2. Analysis of Thin Film by AES and XPS / p15 (0013.jp2)
  10. 2-3. RBS Measurements for Depth and Thin Film Analysis / p18 (0015.jp2)
  11. 2-4. Polarization Dependence of Reflectivity / p21 (0016.jp2)
  12. Chapter 3. LASER-INDUCED DRY ETCHING / p26 (0019.jp2)
  13. 3-1. Introduction / p26 (0019.jp2)
  14. 3-2. Etching in CCl₄ Gas Atmosphere / p27 (0019.jp2)
  15. 3-3. Etching in CCl₂F₂ Gas Atmosphere / p38 (0025.jp2)
  16. 3-4. Summary / p51 (0031.jp2)
  17. Chapter 4. LASER-INDUCED WET ETCHING AND MeV ION IMPLANTATION / p53 (0032.jp2)
  18. 4-1. Introduction / p53 (0032.jp2)
  19. 4-2. Etching in H₃P0₄ Aqueous Solution / p54 (0033.jp2)
  20. 4-3. Etching Suppression by MeV Ion Implantation / p66 (0039.jp2)
  21. 4-4. Modification of Magnetic Property by MeV Ion Implantation / p77 (0044.jp2)
  22. 4-5. Summary / p81 (0046.jp2)
  23. Chapter 5. LASER-INDUCED DEPOSITION / p83 (0047.jp2)
  24. 5-1. Introduction / p83 (0047.jp2)
  25. 5-2. Deposition of Buried Si0₂ Lines from SiCl₄ Gas Ambient / p84 (0048.jp2)
  26. 5-3. Deposition of Ni-Lines from NiSO₄ Solution / p94 (0053.jp2)
  27. 5-4. Deposition of Ag-Lines from CH₃C00Ag Solid Film / p103 (0057.jp2)
  28. 5-5. Summary / p111 (0061.jp2)
  29. Chapter 6. CONCLUSIONS / p113 (0062.jp2)
  30. APPENDIX / p116 (0064.jp2)
  31. ACKNOWLEDGMENTS / p118 (0065.jp2)
  32. REFERENCES / p120 (0066.jp2)
  33. PUBLICATIONS / p127 (0069.jp2)
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Codes

  • NII Article ID (NAID)
    500000075806
  • NII Author ID (NRID)
    • 8000000076006
  • DOI(NDL)
  • Text Lang
    • und
  • NDLBibID
    • 000000240120
  • Source
    • Institutional Repository
    • NDL ONLINE
    • NDL Digital Collections

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