Non-destructive analysis using soft X-ray emission spectroscopy (SXES) : application for metal/semiconductor contacts and construction of a new SXES apparatus for surface and interface studies 軟X線分光法を用いた非破壊分析法とその金属/半導体接合系評価への応用
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Bibliographic Information
- Title
-
Non-destructive analysis using soft X-ray emission spectroscopy (SXES) : application for metal/semiconductor contacts and construction of a new SXES apparatus for surface and interface studies
- Other Title
-
軟X線分光法を用いた非破壊分析法とその金属/半導体接合系評価への応用
- Author
-
渡部, 宏邦, 1944-
- Author(Another name)
-
ワタベ, ヒロクニ
- University
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大阪大学
- Types of degree
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工学博士
- Grant ID
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乙第5654号
- Degree year
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1992-02-25
Note and Description
博士論文
Table of Contents
- CONTENTS / p4 (0005.jp2)
- Chapter1:Introduction / p1 (0006.jp2)
- References / p13 (0012.jp2)
- Chapter2:Experimental Methods / p14 (0013.jp2)
- 2.1 Soft X-Ray Emission Spectroscopy:Principles for Grating Monochromator / p14 (0013.jp2)
- 2.2 Experimental Apparatus / p25 (0018.jp2)
- References / p32 (0022.jp2)
- Chapter3:Non-Destructive Analysis Using SXES / p33 (0022.jp2)
- Abstract / p33 (0022.jp2)
- 3.1 Transition-Metal-Silicides/Si Contact Systems / p33 (0022.jp2)
- 3.2 Au(film)/Si(111)Contact System / p48 (0030.jp2)
- References / p61 (0036.jp2)
- Chapter4:Si L₂,₃ soft X-ray Emission Band Spectra for Different Si Compounds and Assignment of them. / p63 (0037.jp2)
- Abstract / p63 (0037.jp2)
- 4.1 Transition Metal Silicides / p63 (0037.jp2)
- 4.2 Au-Si Alloy / p75 (0043.jp2)
- References / p90 (0051.jp2)
- Chapter5:Construction of a New Surface Sensitive Soft X-Ray Emission Spectroscopy(SXES)Apparatus / p93 (0052.jp2)
- Abstract / p93 (0052.jp2)
- 5.1 Introduction / p93 (0052.jp2)
- 5.2 Experimental / p94 (0053.jp2)
- 5.3 Construction of the SXES System / p95 (0053.jp2)
- 5.4 Surface and Interface Analysis of a Thin Film/Si(Substrate)specimen by Off-normal Incidence of Primary Electron. / p99 (0055.jp2)
- 5.5 Summary / p106 (0059.jp2)
- References / p106 (0059.jp2)
- Chapter6:Summary and Conclusion / p108 (0060.jp2)
- Acknowledgement / p111 (0061.jp2)
- List of Publications / p112 (0062.jp2)