Low temperature growth of pure polycrystalline diamond films by microwave plasma assisted chemical vapor deposition マイクロ波プラズマCVDによる高純度ダイアモンド薄膜の低温成長に関する研究

この論文をさがす

著者

    • 村中, 廉 ムラナカ, ヤスシ

書誌事項

タイトル

Low temperature growth of pure polycrystalline diamond films by microwave plasma assisted chemical vapor deposition

タイトル別名

マイクロ波プラズマCVDによる高純度ダイアモンド薄膜の低温成長に関する研究

著者名

村中, 廉

著者別名

ムラナカ, ヤスシ

学位授与大学

早稲田大学

取得学位

工学博士

学位授与番号

乙第857号

学位授与年月日

1991-10-17

注記・抄録

博士論文

目次

  1. CONTENTS / (0003.jp2)
  2. CHAPTER I INTRODUCTION / (0007.jp2)
  3. 1.1 Motivation / p1 (0008.jp2)
  4. 1.2 History of diamond deposition / p2 (0009.jp2)
  5. 1.3 Previous studies on low temperature growth of polycrystalline diamond films / p3 (0010.jp2)
  6. 1.4 Examined items and summaries of the results in the present thesis / p5 (0012.jp2)
  7. References / p8 (0015.jp2)
  8. CHAPTER II SCREENING OF BASE SOURCE GAS SYSTEMS AND THE POSSIBILITY OF LOW TEMPERATURE GROWTH OF DIAMOND FILMS / (0017.jp2)
  9. 2.1 Introduction / p10 (0018.jp2)
  10. 2.2 Experimental / p11 (0019.jp2)
  11. 2.3 Results / p14 (0022.jp2)
  12. References / p28 (0036.jp2)
  13. CHAPTER III THE ROLE OF ATOMIC HYDROGEN IN THE GAS PHASE ON DIAMOND SYNTHESIS / (0037.jp2)
  14. 3.1 Introduction / p29 (0038.jp2)
  15. 3.2 Experimental / p30 (0039.jp2)
  16. 3.3. Results / p33 (0042.jp2)
  17. 3.4 Discussion / p44 (0053.jp2)
  18. 3.5 Conclusions / p50 (0059.jp2)
  19. References / p52 (0061.jp2)
  20. CHAPTER IV THE ROLE OF ATOMIC HYDROGEN ON A GROWTH SURFACE DURING DIAMOND SYNTHESIS / (0063.jp2)
  21. 4.1 Introduction / p54 (0064.jp2)
  22. 4.2 Experimental / p55 (0065.jp2)
  23. 4.3 Results / p56 (0066.jp2)
  24. 4.4 Discussion / p71 (0081.jp2)
  25. 4.5 Conclusions / p77 (0087.jp2)
  26. References / p78 (0088.jp2)
  27. CHAPTER V THE ROLE OF OXYGEN ON DIAMOND SYNTHESIS / (0090.jp2)
  28. 5.1 Introduction / p80 (0091.jp2)
  29. 5.2 Experimental / p81 (0092.jp2)
  30. 5.3 Results / p81 (0092.jp2)
  31. 5.4 Discussion / p89 (0100.jp2)
  32. 5.5 Conclusions / p94 (0105.jp2)
  33. References / p96 (0107.jp2)
  34. CHAPTER VI DIAMOND GROWTH IN C0/C0₂/H₂ AND CO/O₂ / H₂ SYSTEMS (0108.jp2)
  35. 6.1 Introduction / p97 (0109.jp2)
  36. 6.2 Experimental / p97 (0109.jp2)
  37. 6.3 Results and discussion / p98 (0110.jp2)
  38. 6.4 Conclusions / p114 (0126.jp2)
  39. References / p116 (0128.jp2)
  40. CHAPTER VII LOW TEMPERATURE GROWTH OF PURE DIAMOND / (0129.jp2)
  41. 7.1 Introduction / p117 (0130.jp2)
  42. 7.2 Experimental / p118 (0131.jp2)
  43. 7.3 Results / p118 (0131.jp2)
  44. 7.4 Discussion / p139 (0152.jp2)
  45. 7.5 Conclusions / p142 (0155.jp2)
  46. References / p143 (0156.jp2)
  47. CHAPTER VIII CATHODOLUMINESCENCE PROPERTIES OF DIAMOND FILMS / (0157.jp2)
  48. 8.1 Introduction / p144 (0158.jp2)
  49. 8.2 Experimental / p145 (0159.jp2)
  50. 8.3 Results and discussion / p147 (0161.jp2)
  51. 8.4 Conclusions / p164 (0178.jp2)
  52. References / p166 (0180.jp2)
  53. CHAPTER IX CONCLUDING REMARKS / p167 (0182.jp2)
  54. List of papers / p174 (0190.jp2)
  55. Acknowledgement / p176 (0193.jp2)
  56. Achievements of previous research by the author of this thesis / p178 (0196.jp2)
0アクセス

各種コード

  • NII論文ID(NAID)
    500000086639
  • NII著者ID(NRID)
    • 8000000086853
  • DOI(NDL)
  • 本文言語コード
    • eng
  • NDL書誌ID
    • 000000250953
  • データ提供元
    • 機関リポジトリ
    • NDL-OPAC
    • NDLデジタルコレクション
ページトップへ