Low temperature growth of pure polycrystalline diamond films by microwave plasma assisted chemical vapor deposition マイクロ波プラズマCVDによる高純度ダイアモンド薄膜の低温成長に関する研究
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著者
書誌事項
- タイトル
-
Low temperature growth of pure polycrystalline diamond films by microwave plasma assisted chemical vapor deposition
- タイトル別名
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マイクロ波プラズマCVDによる高純度ダイアモンド薄膜の低温成長に関する研究
- 著者名
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村中, 廉
- 著者別名
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ムラナカ, ヤスシ
- 学位授与大学
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早稲田大学
- 取得学位
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工学博士
- 学位授与番号
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乙第857号
- 学位授与年月日
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1991-10-17
注記・抄録
博士論文
制度:新 ; 文部省報告番号:乙857号 ; 学位の種類:博士(工学) ; 授与年月日:1991-10-17 ; 早大学位記番号:新1748 ; 理工学図書館請求番号:1489
目次
- CONTENTS / (0003.jp2)
- CHAPTER I INTRODUCTION / (0007.jp2)
- 1.1 Motivation / p1 (0008.jp2)
- 1.2 History of diamond deposition / p2 (0009.jp2)
- 1.3 Previous studies on low temperature growth of polycrystalline diamond films / p3 (0010.jp2)
- 1.4 Examined items and summaries of the results in the present thesis / p5 (0012.jp2)
- References / p8 (0015.jp2)
- CHAPTER II SCREENING OF BASE SOURCE GAS SYSTEMS AND THE POSSIBILITY OF LOW TEMPERATURE GROWTH OF DIAMOND FILMS / (0017.jp2)
- 2.1 Introduction / p10 (0018.jp2)
- 2.2 Experimental / p11 (0019.jp2)
- 2.3 Results / p14 (0022.jp2)
- References / p28 (0036.jp2)
- CHAPTER III THE ROLE OF ATOMIC HYDROGEN IN THE GAS PHASE ON DIAMOND SYNTHESIS / (0037.jp2)
- 3.1 Introduction / p29 (0038.jp2)
- 3.2 Experimental / p30 (0039.jp2)
- 3.3. Results / p33 (0042.jp2)
- 3.4 Discussion / p44 (0053.jp2)
- 3.5 Conclusions / p50 (0059.jp2)
- References / p52 (0061.jp2)
- CHAPTER IV THE ROLE OF ATOMIC HYDROGEN ON A GROWTH SURFACE DURING DIAMOND SYNTHESIS / (0063.jp2)
- 4.1 Introduction / p54 (0064.jp2)
- 4.2 Experimental / p55 (0065.jp2)
- 4.3 Results / p56 (0066.jp2)
- 4.4 Discussion / p71 (0081.jp2)
- 4.5 Conclusions / p77 (0087.jp2)
- References / p78 (0088.jp2)
- CHAPTER V THE ROLE OF OXYGEN ON DIAMOND SYNTHESIS / (0090.jp2)
- 5.1 Introduction / p80 (0091.jp2)
- 5.2 Experimental / p81 (0092.jp2)
- 5.3 Results / p81 (0092.jp2)
- 5.4 Discussion / p89 (0100.jp2)
- 5.5 Conclusions / p94 (0105.jp2)
- References / p96 (0107.jp2)
- CHAPTER VI DIAMOND GROWTH IN C0/C0₂/H₂ AND CO/O₂ / H₂ SYSTEMS (0108.jp2)
- 6.1 Introduction / p97 (0109.jp2)
- 6.2 Experimental / p97 (0109.jp2)
- 6.3 Results and discussion / p98 (0110.jp2)
- 6.4 Conclusions / p114 (0126.jp2)
- References / p116 (0128.jp2)
- CHAPTER VII LOW TEMPERATURE GROWTH OF PURE DIAMOND / (0129.jp2)
- 7.1 Introduction / p117 (0130.jp2)
- 7.2 Experimental / p118 (0131.jp2)
- 7.3 Results / p118 (0131.jp2)
- 7.4 Discussion / p139 (0152.jp2)
- 7.5 Conclusions / p142 (0155.jp2)
- References / p143 (0156.jp2)
- CHAPTER VIII CATHODOLUMINESCENCE PROPERTIES OF DIAMOND FILMS / (0157.jp2)
- 8.1 Introduction / p144 (0158.jp2)
- 8.2 Experimental / p145 (0159.jp2)
- 8.3 Results and discussion / p147 (0161.jp2)
- 8.4 Conclusions / p164 (0178.jp2)
- References / p166 (0180.jp2)
- CHAPTER IX CONCLUDING REMARKS / p167 (0182.jp2)
- List of papers / p174 (0190.jp2)
- Acknowledgement / p176 (0193.jp2)
- Achievements of previous research by the author of this thesis / p178 (0196.jp2)
