Evaluation of hetero interfaces in semiconductor and magnetic devices by sputter-assisted Auger electron spectroscopy オージェ電子分光法による半導体及び磁気デバイスのヘテロ界面評価の研究
この論文にアクセスする
この論文をさがす
著者
書誌事項
- タイトル
-
Evaluation of hetero interfaces in semiconductor and magnetic devices by sputter-assisted Auger electron spectroscopy
- タイトル別名
-
オージェ電子分光法による半導体及び磁気デバイスのヘテロ界面評価の研究
- 著者名
-
梶原, 和夫
- 著者別名
-
カジワラ, カズオ
- 学位授与大学
-
大阪大学
- 取得学位
-
工学博士
- 学位授与番号
-
乙第5801号
- 学位授与年月日
-
1992-09-22
注記・抄録
博士論文
目次
- Contents / p3 (0004.jp2)
- Preface / p1 (0003.jp2)
- Acknowledgements / p2 (0004.jp2)
- Chapter1.Introduction / p1 (0006.jp2)
- 1.1 Analytical techniques as applied to characterization of interfaces / p1 (0006.jp2)
- 1.2 TEM observation / p4 (0008.jp2)
- 1.3 Depth profile analysis by surface analytical techniques / p6 (0009.jp2)
- 1.4 Scope of this thesis / p11 (0011.jp2)
- References / p14 (0013.jp2)
- Figures / p16 (0014.jp2)
- Chapter2.TEM Observation of AlAs/GaAs Superlattices / p18 (0015.jp2)
- 2.1 Introduction / p18 (0015.jp2)
- 2.2 Experimental / p19 (0016.jp2)
- 2.3 Results and Discussion / p21 (0017.jp2)
- 2.4 Conclusions / p23 (0018.jp2)
- References / p25 (0019.jp2)
- Figures / p27 (0020.jp2)
- Chapter3.Evaluation of AlGaAs/GaAs Superlattices by AES/SEM/TEM / p32 (0022.jp2)
- 3.1 Introduction / p32 (0022.jp2)
- 3.2 Evaluation of AlGaAs/GaAs superlattices by AES / p33 (0023.jp2)
- 3.3 Evaluation of AlAs/GaAs superlattices by AES,SEM and TEM / p37 (0025.jp2)
- 3.4 Conclusions / p40 (0026.jp2)
- References / p41 (0027.jp2)
- Figures / p42 (0027.jp2)
- Chapter4.Development of Sputter-assisted AES on AlGaAs/GaAs Superlattices / p54 (0033.jp2)
- 4.1 Introduction / p54 (0033.jp2)
- 4.2 Experimental / p56 (0034.jp2)
- 4.3 Results and Discussion / p59 (0036.jp2)
- 4.4 Conclusions / p62 (0037.jp2)
- References / p64 (0038.jp2)
- Figures / p65 (0039.jp2)
- Chapter5.Evaluation of Ta₂O₅/Si Interface by Sputter-assisted AES / p74 (0043.jp2)
- 5.1 Introduction / p74 (0043.jp2)
- 5.2 Experimental / p75 (0044.jp2)
- 5.3 Results and discussion / p77 (0045.jp2)
- 5.4 Conclusions / p81 (0047.jp2)
- References / p83 (0048.jp2)
- Figures / p84 (0048.jp2)
- Chapter6.Evaluation of Magnetic metal/Ferrite Interface by Sputter-assisted AES / p92 (0052.jp2)
- 6.1 Introduction / p92 (0052.jp2)
- 6.2 Experimental / p93 (0053.jp2)
- 6.3 Results and discussion / p95 (0054.jp2)
- 6.4 Conclusions / p100 (0056.jp2)
- References / p102 (0057.jp2)
- Figures / p103 (0058.jp2)
