Preparation of coating films by the sol-gel method and application to fine-patterning process for optical memory disk substrates ゾル-ゲル法によるコーティング薄膜の作製と光ディスク基板のための微細加工プロセスへの応用

この論文をさがす

著者

    • 松田, 厚範 マツダ, アツノリ

書誌事項

タイトル

Preparation of coating films by the sol-gel method and application to fine-patterning process for optical memory disk substrates

タイトル別名

ゾル-ゲル法によるコーティング薄膜の作製と光ディスク基板のための微細加工プロセスへの応用

著者名

松田, 厚範

著者別名

マツダ, アツノリ

学位授与大学

大阪府立大学

取得学位

博士 (工学)

学位授与番号

乙第712号

学位授与年月日

1992-11-20

注記・抄録

博士論文

目次

  1. Contents / p1 (0003.jp2)
  2. 1.General Introduction / p1 (0010.jp2)
  3. 2.Preparation of Alkali Passivation Coating Films by the Sol-Gel Method / p8 (0017.jp2)
  4. 2.1.Preparation of B₂O₃-SiO₂ Coating Films / p8 (0017.jp2)
  5. 2.2.Influences of Humidity in the Atmosphere on the Formation of B₂O₃-SiO₂ Coating Films / p18 (0027.jp2)
  6. 2.3.Preparation of B₂O₃-P₂O₅-SiO₂ Coating Films and Alkali Passivation / p29 (0038.jp2)
  7. 3.Preparation of Alkali Resistant Coating Films by the Sol-Gel Method / p47 (0056.jp2)
  8. 3.1.Preparation of ZrO₂ Coating Films / p47 (0056.jp2)
  9. 3.2.Preparation of ZrO₂-SiO₂ Coating Films and Alkali Durability / p53 (0062.jp2)
  10. 4.Properties of Organic Polymer-Containing Gel Films and Their Application to the Fine-Patterning Process / p61 (0070.jp2)
  11. 4.1.A Novel Fine-Patterning Process on Glass Substrate Based on the Sol-Gel Method / p61 (0070.jp2)
  12. 4.2.Effects of the Addition of Organic Polymers on Gelation Process / p73 (0082.jp2)
  13. 5.Development of Pregrooved Glass Substrates for Optical Memory Disks by the Fine-Patterning Process / p84 (0093.jp2)
  14. 5.1.Physical and Chemical Properties of 9TiO₂・91SiO₂ Films Derived from Poly(ethylene glycol) Containing Gels / p84 (0093.jp2)
  15. 5.2.Effects of Poly(ethylene glycol) on the Formation of 16.5TiO₂・83.5SiO₂ Glass Films / p101 (0110.jp2)
  16. 5.3.Formation and Evaluation of Pregrooved Glass Substrates for Optical Memory Disks / p118 (0127.jp2)
  17. 6.Weathering Resistance of Glass Substrates Coated with Sol-Gel Derived Films / p139 (0148.jp2)
  18. 6.1.Weathering Resistance of Glass Substrates Coated with Sol-Gel Derived 9TiO₂・91SiO₂ Films / p139 (0148.jp2)
  19. 6.2.Influences of Humidity and Temperature on Weathering of Glass Substrates Coated with Sol-Gel Derived Films / p148 (0157.jp2)
  20. 6.3.Mechanism of Weathering Resistance of Sol-Gel Derived TiO₂-SiO₂ Coating Films on Soda-Lime-Silica Glass Substrates / p162 (0171.jp2)
  21. 7.Stability of the Sol-Gel Derived Films in an Environment of High Temperature and High Humidity / p175 (0184.jp2)
  22. 7.1.Introduction / p175 (0184.jp2)
  23. 7.2.Experimental Procedure / p175 (0184.jp2)
  24. 7.3.Results and Discussion / p177 (0186.jp2)
  25. 7.4.Summary / p191 (0200.jp2)
  26. 7.5.References / p193 (0202.jp2)
  27. 8.General Conclusion / p194 (0203.jp2)
  28. Acknowledgements / p197 (0206.jp2)
0アクセス

各種コード

  • NII論文ID(NAID)
    500000091682
  • NII著者ID(NRID)
    • 8000000091907
  • DOI(NDL)
  • NDL書誌ID
    • 000000255996
  • データ提供元
    • NDL-OPAC
    • NDLデジタルコレクション
ページトップへ