Preparation of coating films by the sol-gel method and application to fine-patterning process for optical memory disk substrates ゾル-ゲル法によるコーティング薄膜の作製と光ディスク基板のための微細加工プロセスへの応用

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Author

    • 松田, 厚範 マツダ, アツノリ

Bibliographic Information

Title

Preparation of coating films by the sol-gel method and application to fine-patterning process for optical memory disk substrates

Other Title

ゾル-ゲル法によるコーティング薄膜の作製と光ディスク基板のための微細加工プロセスへの応用

Author

松田, 厚範

Author(Another name)

マツダ, アツノリ

University

大阪府立大学

Types of degree

博士 (工学)

Grant ID

乙第712号

Degree year

1992-11-20

Note and Description

博士論文

Table of Contents

  1. Contents/p1 (3コマ目)
  2. 1.General Introduction/p1 (10コマ目)
  3. 2.Preparation of Alkali Passivation Coating Films by the Sol-Gel Method/p8 (17コマ目)
  4. 2.1.Preparation of B₂O₃-SiO₂ Coating Films/p8 (17コマ目)
  5. 2.2.Influences of Humidity in the Atmosphere on the Formation of B₂O₃-SiO₂ Coating Films/p18 (27コマ目)
  6. 2.3.Preparation of B₂O₃-P₂O₅-SiO₂ Coating Films and Alkali Passivation/p29 (38コマ目)
  7. 3.Preparation of Alkali Resistant Coating Films by the Sol-Gel Method/p47 (56コマ目)
  8. 3.1.Preparation of ZrO₂ Coating Films/p47 (56コマ目)
  9. 3.2.Preparation of ZrO₂-SiO₂ Coating Films and Alkali Durability/p53 (62コマ目)
  10. 4.Properties of Organic Polymer-Containing Gel Films and Their Application to the Fine-Patterning Process/p61 (70コマ目)
  11. 4.1.A Novel Fine-Patterning Process on Glass Substrate Based on the Sol-Gel Method/p61 (70コマ目)
  12. 4.2.Effects of the Addition of Organic Polymers on Gelation Process/p73 (82コマ目)
  13. 5.Development of Pregrooved Glass Substrates for Optical Memory Disks by the Fine-Patterning Process/p84 (93コマ目)
  14. 5.1.Physical and Chemical Properties of 9TiO₂･91SiO₂ Films Derived from Poly(ethylene glycol) Containing Gels/p84 (93コマ目)
  15. 5.2.Effects of Poly(ethylene glycol) on the Formation of 16.5TiO₂･83.5SiO₂ Glass Films/p101 (110コマ目)
  16. 5.3.Formation and Evaluation of Pregrooved Glass Substrates for Optical Memory Disks/p118 (127コマ目)
  17. 6.Weathering Resistance of Glass Substrates Coated with Sol-Gel Derived Films/p139 (148コマ目)
  18. 6.1.Weathering Resistance of Glass Substrates Coated with Sol-Gel Derived 9TiO₂･91SiO₂ Films/p139 (148コマ目)
  19. 6.2.Influences of Humidity and Temperature on Weathering of Glass Substrates Coated with Sol-Gel Derived Films/p148 (157コマ目)
  20. 6.3.Mechanism of Weathering Resistance of Sol-Gel Derived TiO₂-SiO₂ Coating Films on Soda-Lime-Silica Glass Substrates/p162 (171コマ目)
  21. 7.Stability of the Sol-Gel Derived Films in an Environment of High Temperature and High Humidity/p175 (184コマ目)
  22. 7.1.Introduction/p175 (184コマ目)
  23. 7.2.Experimental Procedure/p175 (184コマ目)
  24. 7.3.Results and Discussion/p177 (186コマ目)
  25. 7.4.Summary/p191 (200コマ目)
  26. 7.5.References/p193 (202コマ目)
  27. 8.General Conclusion/p194 (203コマ目)
  28. Acknowledgements/p197 (206コマ目)
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Codes

  • NII Article ID (NAID)
    500000091682
  • NII Author ID (NRID)
    • 8000000091907
  • DOI(NDL)
  • NDLBibID
    • 000000255996
  • Source
    • NDL ONLINE
    • NDL Digital Collections

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