Origin and structure of defects in hydrogenated amorphous silicon and its alloys 水酸化アモルファスシリコン及びその合金における欠陥の起源と構造
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著者
書誌事項
- タイトル
-
Origin and structure of defects in hydrogenated amorphous silicon and its alloys
- タイトル別名
-
水酸化アモルファスシリコン及びその合金における欠陥の起源と構造
- 著者名
-
厳, 輝
- 著者別名
-
イエン, ホイ
- 学位授与大学
-
金沢大学
- 取得学位
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博士 (理学)
- 学位授与番号
-
甲第1158号
- 学位授与年月日
-
1993-03-25
注記・抄録
博士論文
目次
- Chapter1.Introduction / p5 (0005.jp2)
- 1-1 Background / p5 (0005.jp2)
- 1-2 Purpose and organization of this study / p8 (0007.jp2)
- References / p10 (0008.jp2)
- Chapter2.Comparison between ESR and CPM for the Gap States in [数式]:H / p13 (0009.jp2)
- 2-1 Introduction / p13 (0009.jp2)
- 2-2 Experimental / p14 (0010.jp2)
- 2-3 Constant photocurrent method (CPM) / p16 (0011.jp2)
- 2-4 Deconvolution of ESR signals / p20 (0013.jp2)
- 2-5 Results and Discussion / p25 (0015.jp2)
- 2-6 Conculsion / p32 (0019.jp2)
- References / p34 (0020.jp2)
- Chapter3.Thermal Equilibration of Defect Density and Conductivity in Amorphous Silicon-GermaniumAlloys and Other Silicon-based Films / p36 (0021.jp2)
- 3-1 Introduction / p36 (0021.jp2)
- 3-2 Experimental / p41 (0023.jp2)
- 3-3 Results / p44 (0025.jp2)
- 3-4 Temperature dependence of defect density in a-Si:H and its alloys / p57 (0031.jp2)
- 3-5 Conclusion / p74 (0040.jp2)
- References / p75 (0040.jp2)
- Chapter4.Origin of Surface Defects in a-Si:H Films / p78 (0042.jp2)
- 4-1 Introduction / p78 (0042.jp2)
- 4-2 Experimental / p78 (0042.jp2)
- 4-3 Results / p79 (0042.jp2)
- 4-4 Discussion / p90 (0048.jp2)
- 4-5 Conclusion / p93 (0049.jp2)
- References / p94 (0050.jp2)
- Chapter5.Identification of a New Defect in Silicon Nitride Films / p96 (0051.jp2)
- 5-1 Introduction / p96 (0051.jp2)
- 5-2 Experimental / p100 (0053.jp2)
- 5-3 Computer Simulation / p102 (0054.jp2)
- 5-4 Results and discussion / p105 (0055.jp2)
- 5-5 Conculsion / p133 (0069.jp2)
- References / p135 (0070.jp2)
- Chapter6.Conculding Summary / p138 (0072.jp2)
- Acknowledgements / p141 (0073.jp2)
- List of Publications Relating to the Thesis / p143 (0074.jp2)
- List of other Publications / p145 (0075.jp2)