Synthesis and characterization of semiconductor diamond films 半導体ダイヤモンド薄膜の作製とその評価
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Bibliographic Information
- Title
-
Synthesis and characterization of semiconductor diamond films
- Other Title
-
半導体ダイヤモンド薄膜の作製とその評価
- Author
-
森, 勇介
- Author(Another name)
-
モリ, ユウスケ
- University
-
大阪大学
- Types of degree
-
博士 (工学)
- Grant ID
-
乙第6938号
- Degree year
-
1996-03-28
Note and Description
博士論文
Table of Contents
- TABLE OF CONTENTS / (0006.jp2)
- ABSTRACT / p1 (0003.jp2)
- ACKNOWLEDGMENTS / p4 (0005.jp2)
- TABLE OF CONTENTS / p7 (0006.jp2)
- LIST OF TABLES / p10 (0008.jp2)
- LIST OF FIGURES / p11 (0008.jp2)
- 1.INTRODUCTION / p19 (0012.jp2)
- 1.1 Properties and Applications of Diamond / p19 (0012.jp2)
- 1.2 History of Synthesized Diamond / p19 (0012.jp2)
- 1.3 Objective of This Work / p20 (0013.jp2)
- 1.4 References / p21 (0013.jp2)
- 2.GROWTH OF DIAMOND FILMS / p23 (0014.jp2)
- 2.1 Introduction / p23 (0014.jp2)
- 2.2 Homoepitaxy of Diamond Films / p25 (0015.jp2)
- 2.3 Doping of Diamond films / p37 (0021.jp2)
- 2.4 Summary / p44 (0025.jp2)
- 2.5 References / p44 (0025.jp2)
- 3.SURFACE OF CVD DIAMOND FILMS / p47 (0026.jp2)
- 3.1 Introduction / p47 (0026.jp2)
- 3.2 As-Grown CVD Diamond Surface / p47 (0026.jp2)
- 3.3 Surface Conductive Layers / p50 (0028.jp2)
- 3.4 Graphitization of Diamond Surface / p56 (0031.jp2)
- 3.5 Summary / p60 (0033.jp2)
- 3.6 References / p60 (0033.jp2)
- 4.FORMATION AND PROPERTIES OF METAL-DIAMOND INTERFACES / p63 (0034.jp2)
- 4.1 Introduction / p63 (0034.jp2)
- 4.2 Metal-CVD diamond interface formation / p63 (0034.jp2)
- 4.3 Properties of Metal-Diamond Interfaces / p78 (0042.jp2)
- 4.4 Summary / p88 (0047.jp2)
- 4.5 References / p90 (0048.jp2)
- 5.ION IMPLANTATION IN DIAMOND / p93 (0049.jp2)
- 5.1 Introduction / p93 (0049.jp2)
- 5.2 Implantation Damage in Diamond Films / p94 (0050.jp2)
- 5.3 Electrical Doping of Diamond Films by Ion Implantation / p98 (0052.jp2)
- 5.4 Summary / p104 (0055.jp2)
- 5.5 References / p105 (0055.jp2)
- 6.HYDROGEN ENHANCED OXYGEN DIFFUSION IN DIAMOND / p107 (0056.jp2)
- 6.1 Introduction / p107 (0056.jp2)
- 6.2 Oxygen Diffusion into Diamond Induced by Hydrogen μ-wave Plasma / p107 (0056.jp2)
- 6.3 Cathodoluminescence of Oxygen Diffused Diamond / p111 (0058.jp2)
- 6.4 Summary / p112 (0059.jp2)
- 6.5 References / p112 (0059.jp2)
- 7.CONCLUSIONS / p113 (0059.jp2)
- 7.1 Summary / p113 (0059.jp2)
- 7.2 Direction of Future Work / p117 (0061.jp2)
- LIST OF PUBLICATIONS / p119 (0062.jp2)
- PRESENTATIONS AT INTERNATIONAL CONFERENCE / p122 (0064.jp2)