Study of interfaces of insulator/Ⅲ-Ⅴ compound semiconductor structures prepared by molecular beam deposition 分子線蒸着法により作成された絶縁物/Ⅲ-Ⅴ族化合物半導体構造の界面の研究

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Author

    • 大山, 秀明 オオヤマ, ヒデアキ

Bibliographic Information

Title

Study of interfaces of insulator/Ⅲ-Ⅴ compound semiconductor structures prepared by molecular beam deposition

Other Title

分子線蒸着法により作成された絶縁物/Ⅲ-Ⅴ族化合物半導体構造の界面の研究

Author

大山, 秀明

Author(Another name)

オオヤマ, ヒデアキ

University

大阪大学

Types of degree

博士 (工学)

Grant ID

乙第6979号

Degree year

1996-06-27

Note and Description

博士論文

Table of Contents

  1. Abstract / p1 (0003.jp2)
  2. Contents / p3 (0005.jp2)
  3. Chapter 1 Introduction / p1 (0007.jp2)
  4. 1.1 Review of Interface Study of Insulator/III-V Compound Semiconductor Structures / p1 (0007.jp2)
  5. 1.2 Summary of Present Study / p5 (0011.jp2)
  6. Chapter 2 Structural Study of CaF₂,Al₂O₃/GaAs and Al₂O₃/InP by HEIS / p8 (0014.jp2)
  7. 2.1 Introduction / p8 (0014.jp2)
  8. 2.2 Physical Concepts of HEIS / p8 (0014.jp2)
  9. 2.3 Experimental Apparatus / p14 (0020.jp2)
  10. 2.4 HEIS Measurement / p17 (0023.jp2)
  11. 2.5 Calculation of Surface Peak Intensity / p23 (0029.jp2)
  12. 2.6 Sample Preparation / p40 (0046.jp2)
  13. 2.7 Results and Discusssion / p41 (0047.jp2)
  14. 2.8 Summary / p55 (0061.jp2)
  15. Chapter 3 Fabrication and Electrical Properties of Al₂O₃/InP-MIS Diode / p56 (0062.jp2)
  16. 3.1 Introduction / p56 (0062.jp2)
  17. 3.2 Sample Preparation / p56 (0062.jp2)
  18. 3.3 Characterization of Al₂O₃ / p59 (0065.jp2)
  19. 3.4 C-V and NSS measurements / p62 (0068.jp2)
  20. 3.5 Results and Discussion / p65 (0071.jp2)
  21. 3.6 Summary / p71 (0077.jp2)
  22. Chapter 4 Fabrication and Electrical Properties of InP-MISFET / p72 (0078.jp2)
  23. 4.1 Introduction / p72 (0078.jp2)
  24. 4.2 Fabrication of InP-MISFET / p72 (0078.jp2)
  25. 4.3 Results and Discussion / p74 (0080.jp2)
  26. 4.4 Summary / p76 (0082.jp2)
  27. Chapter 5 Conclusion / p77 (0083.jp2)
  28. Appendix A General Formalism in HIES / p79 (0085.jp2)
  29. A.1 Kinematics of HEIS / p79 (0085.jp2)
  30. A.2 Multiple Scattering Effect / p84 (0090.jp2)
  31. A.3 Particle Induced X-ray Emission(PIXE) / p86 (0092.jp2)
  32. References / p87 (0093.jp2)
  33. Acknowledgement / p91 (0097.jp2)
  34. Publications and Presentations / p92 (0098.jp2)
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Codes

  • NII Article ID (NAID)
    500000133994
  • NII Author ID (NRID)
    • 8000000973110
  • DOI(NDL)
  • Text Lang
    • und
  • NDLBibID
    • 000000298308
  • Source
    • Institutional Repository
    • NDL ONLINE
    • NDL Digital Collections

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