Transmission electron microscopic study on the interface and near-surface structures of chemical-vapor-deposited diamond 透過型電子顕微鏡による気相合成ダイヤモンドの基板界面及び表面近傍の微細構造に関する研究
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著者
書誌事項
- タイトル
-
Transmission electron microscopic study on the interface and near-surface structures of chemical-vapor-deposited diamond
- タイトル別名
-
透過型電子顕微鏡による気相合成ダイヤモンドの基板界面及び表面近傍の微細構造に関する研究
- 著者名
-
江, 南
- 著者別名
-
コウ, ナン
- 学位授与大学
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大阪大学
- 取得学位
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博士 (工学)
- 学位授与番号
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甲第6076号
- 学位授与年月日
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1997-06-30
注記・抄録
博士論文
目次
- CONTENTS / p4 (0005.jp2)
- ABSTRACT / p1 (0003.jp2)
- CONTENTS / p4 (0005.jp2)
- 1. INTRODUCTION / p7 (0006.jp2)
- 1.1 Crystalline structure of diamond / p7 (0006.jp2)
- 1.2 Properties and applications of diamond / p7 (0006.jp2)
- 1.3 A brief perspective of diamond synthesis history / p11 (0008.jp2)
- 1.4 Research approach / p13 (0009.jp2)
- References / p14 (0010.jp2)
- 2. TRANSMISSION ELECTRON MICROSCOPY IN CVD DIAMOND STUDY / p16 (0011.jp2)
- 2.1 Introduction / p16 (0011.jp2)
- 2.2 Electron wavelength / p16 (0011.jp2)
- 2.3 Sample preparation for TEM / p18 (0012.jp2)
- 2.4 Interpretation of typical diffraction patterns of CVD diamond / p20 (0013.jp2)
- 2.5 Interpretation of typical HREM imagesof CVD diamond / p23 (0014.jp2)
- 2.6 Summary / p27 (0016.jp2)
- References / p27 (0016.jp2)
- 3. INTERFACIAL CHARACTERIZATIONS OF CVD DIAMOND ON Si SUBSTRATES / p29 (0017.jp2)
- 3.1 Introduction / p29 (0017.jp2)
- 3.2 Sample preparation / p30 (0018.jp2)
- 3.3 Diamond nucleation on the intermediate layers / p31 (0018.jp2)
- 3.4 Pretreatment-enhanced diamond nucleation / p41 (0023.jp2)
- 3.5 Formation of twins in the initial stages / p45 (0025.jp2)
- 3.6 Si surface changes during the deposition / p50 (0028.jp2)
- 3.7 Discussion / p52 (0029.jp2)
- 3.8 Summary / p56 (0031.jp2)
- References / p57 (0031.jp2)
- 4. INITIAL GROWTH OF (111) TEXTURING DIAMOND ON COPPER AND PLATINUM / p60 (0033.jp2)
- 4.1 Introduction / p60 (0033.jp2)
- 4.2 Sample preparation / p61 (0033.jp2)
- 4.3 Characterizations of CVD diamonds grown on Cu and Pt / p63 (0034.jp2)
- 4.4 Discussion / p72 (0039.jp2)
- 4.5 Summary / p77 (0041.jp2)
- References / p77 (0041.jp2)
- 5. STRUCTURAL FEATURES OF CVD DIAMOND SURFACES / p80 (0043.jp2)
- 5.1 Introduction / p80 (0043.jp2)
- 5.2 Sample preparation / p81 (0043.jp2)
- 5.3 CVD diamond surface features / p82 (0044.jp2)
- 5.4 Etching effect of hydrogen plasma on CVD diamond / p86 (0046.jp2)
- 5.5 summary / p89 (0047.jp2)
- References / p90 (0048.jp2)
- 6. ELECTRON MICROSCOPIC ANALYSIS OF C⁺ AND N⁺ IMPLANTED CVD DIAMOND / p92 (0049.jp2)
- 6.1 Introduction / p92 (0049.jp2)
- 6.2 Sample preparation / p93 (0049.jp2)
- 6.3 Structural modifications of carbon implanted CVD diamond / p95 (0050.jp2)
- 6.4 Hydrogen plasma annealing of N⁺ implanted CVD diamond / p100 (0053.jp2)
- 6.5 Discussion / p104 (0055.jp2)
- 6.6 Summary / p109 (0057.jp2)
- References / p109 (0057.jp2)
- 7. CONCLUSIONS / p112 (0059.jp2)
- ACKNOWLEDGMENTS / p115 (0060.jp2)
- LIST OF PUBLICATIONS / p117 (0061.jp2)
