An analytical study on surface oxidation mechanisms of metal nitride films by means of soft X-ray photoelectron and absorption spectroscopy 軟X線光電子分光法および軟X線吸収分光法による金属窒化物膜の表面酸化メカニズムに関する分析化学的研究

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Author

    • 江坂, 文孝 エサカ, フミタカ

Bibliographic Information

Title

An analytical study on surface oxidation mechanisms of metal nitride films by means of soft X-ray photoelectron and absorption spectroscopy

Other Title

軟X線光電子分光法および軟X線吸収分光法による金属窒化物膜の表面酸化メカニズムに関する分析化学的研究

Author

江坂, 文孝

Author(Another name)

エサカ, フミタカ

University

東京理科大学

Types of degree

博士 (理学)

Grant ID

甲第294号

Degree year

1997-03-20

Note and Description

博士論文

Table of Contents

  1. CONTENTS / (0003.jp2)
  2. CHAPTER 1. INTRODUCTION / p1 (0005.jp2)
  3. 1-1.Metal nitrides / p1 (0005.jp2)
  4. 1-2.Previous studies on surface oxidation mechanisms of nitride films / p4 (0008.jp2)
  5. 1-3.Soft x-ray in the energy range of 200 - 1000 eV from synchrotron radiation as an excitation source / p6 (0010.jp2)
  6. 1-4.The purpose of the present thesis / p9 (0013.jp2)
  7. References / p10 (0014.jp2)
  8. CHAPTER 2. EXPERIMENTAL PROCEDURE / p12 (0016.jp2)
  9. 2-1.Beam line 13C / p12 (0016.jp2)
  10. 2-2.The XPS and XAS apparatus of the BL 13C / p16 (0020.jp2)
  11. 2-3.Samples / p18 (0022.jp2)
  12. 2-4.Experimental procedure / p21 (0025.jp2)
  13. References / p22 (0026.jp2)
  14. CHAPTER 3. SURFACE OXIDATION MECHANISMS OF CrN FILMS UNDER AN AMBIENT AIR / p23 (0027.jp2)
  15. 3-1.Introduction / p23 (0027.jp2)
  16. 3-2.Experimental procedure / p24 (0028.jp2)
  17. 3-3.Results / p25 (0029.jp2)
  18. 3-4.Discussion / p33 (0037.jp2)
  19. 3-5.Surface oxidation mechanisms / p34 (0038.jp2)
  20. References / p36 (0040.jp2)
  21. CHAPTER 4. SURFACE OXIDATION MECHANISMS OF CrN FILMS IN A DRY AIR FLOW / p38 (0042.jp2)
  22. 4-1.Introduction / p38 (0042.jp2)
  23. 4-2.Experimental procedure / p39 (0043.jp2)
  24. 4-3.Results and discussion / p40 (0044.jp2)
  25. 4-4.Nitrogen K-edge XAS spectra of nitrogen molecule in oxidized CrN film / p46 (0050.jp2)
  26. 4-5.Surface oxidation mechanisms / p48 (0052.jp2)
  27. References / p49 (0053.jp2)
  28. CHAPTER 5. COMPARISON OF SURFACE OXIDATION MECHANISMS BETWEEN CrN AND TiN FILMS / p51 (0055.jp2)
  29. 5-1.Introduction / p51 (0055.jp2)
  30. 5-2.Experimental procedure / p53 (0057.jp2)
  31. 5-3.Results / p54 (0058.jp2)
  32. 5-4.Discussion / p70 (0074.jp2)
  33. 5-5.Conclusion / p73 (0077.jp2)
  34. References / p74 (0078.jp2)
  35. CHAPTER 6. DEPTH PROFILE OF OXIDIZED TiAlN FILMS BY SR-XPS UNDER CONTROLLING EXCITATION ENERGY / p76 (0080.jp2)
  36. 6-1.Introduction / p76 (0080.jp2)
  37. 6-2.Experimental procedure / p78 (0082.jp2)
  38. 6-3.Results and discussion / p79 (0083.jp2)
  39. 6-4.Conclusion / p88 (0092.jp2)
  40. References / p89 (0093.jp2)
  41. CHAPTER 7. SUMMARY AND PROSPECTS / p91 (0095.jp2)
  42. LIST OF PUBLICATIONS AND PRESENTATIONS / p94 (0098.jp2)
  43. ACKNOWLEDGMENTS / p99 (0103.jp2)
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Codes

  • NII Article ID (NAID)
    500000151706
  • NII Author ID (NRID)
    • 8000001068649
  • DOI(NDL)
  • NDLBibID
    • 000000316020
  • Source
    • NDL ONLINE
    • NDL Digital Collections

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