Study of Ⅲ-Ⅵ compound semiconductors grown by molecular beam epitaxy 分子線エピタキシー法で成長したⅢ-Ⅵ族化合物半導体に関する研究
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Bibliographic Information
- Title
-
Study of Ⅲ-Ⅵ compound semiconductors grown by molecular beam epitaxy
- Other Title
-
分子線エピタキシー法で成長したⅢ-Ⅵ族化合物半導体に関する研究
- Author
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岡本, 保
- Author(Another name)
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オカモト, タモツ
- University
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東京工業大学
- Types of degree
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博士 (工学)
- Grant ID
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乙第3008号
- Degree year
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1997-02-28
Note and Description
博士論文
Table of Contents
- 論文目録 / (0001.jp2)
- TABLE OF CONTENTS / (0005.jp2)
- Preface / (0004.jp2)
- Chapter 1 Overview and Objectives of This Study / p1 (0008.jp2)
- Chapter 2 Key Features of III-VI and II-III-VI Compound Semiconductors / p5 (0010.jp2)
- 2-1 Introduction / p5 (0010.jp2)
- 2-2 Physical Properties of III-VI Compound Semiconductors / p5 (0010.jp2)
- 2-3 Physical Properties of II-III-VI Compound Semiconductors / p17 (0016.jp2)
- Chapter 3 Molecular Beam Epitaxy of Ga₂Se₃ Thin Films / p19 (0017.jp2)
- 3-1 Introduction / p19 (0017.jp2)
- 3-2 Experimental Procedure / p19 (0017.jp2)
- 3-3 Growth and Characterization of Ga₂Se₃ Thin Films / p21 (0018.jp2)
- 3-4 Growth of Ga₂Se₃ Thin Films by Exchange Reaction between As and Se Atoms in GaAs / p49 (0032.jp2)
- 3-5 Summary / p52 (0034.jp2)
- Chapter 4 Structural Properties of Ga₂Se₃ Epitaxial Films / p55 (0035.jp2)
- 4-1 Introduction / p55 (0035.jp2)
- 4-2 Crystal Structure of Vacancy-Ordered Ga₂Se₃ / p55 (0035.jp2)
- 4-3 Observation of Vacancy Ordering in Ga₂Se₃ Epitaxial Films by Transmission Electron Microscopy / p59 (0037.jp2)
- 4-4 Characterization of Vacancy-Ordered Ga₂Se₃ Epitaxial Films by High Resolution X-Ray Diffraction / p62 (0039.jp2)
- 4-5 Characterization of Interface between Ga₂Se₃ Epitaxial Layer and Substrate / p67 (0041.jp2)
- 4-6 Summary / p71 (0043.jp2)
- Chapter 5 Optical and Electrical Properties of Ga₂Se₃ Films / p73 (0044.jp2)
- 5-1 Introduction / p73 (0044.jp2)
- 5-2 Optical Properties of Ga₂Se₃ Epitaxial Films / p73 (0044.jp2)
- 5-3 Electrical Properties of Ga₂Se₃ Thin Films / p90 (0053.jp2)
- 5-4 Summary / p100 (0058.jp2)
- Chapter 6 Molecular Beam Epitaxy and Characterization of In₂Se₃ Thin Films / p103 (0059.jp2)
- 6-1 Introduction / p103 (0059.jp2)
- 6-2 MBE Growth and Characterization of In₂Se₃ Thin Films / p103 (0059.jp2)
- 6-3 Optical and Electrical Properties of In₂Se₃ Thin Firms / p127 (0071.jp2)
- 6-4 Molecular Beam Epitaxy of (GaIn)₂Se₃ Thin Films / p137 (0076.jp2)
- 6-5 Summary / p141 (0078.jp2)
- Chapter 7 Epitaxial Growth and Characterization of ZnGa₂Se₄ Thin Films / p143 (0079.jp2)
- 7-1 Introduction / p143 (0079.jp2)
- 7-2 Experimental Procedure / p144 (0080.jp2)
- 7-3 Epitaxial Growth of ZnGa₂Se₄ Thin Films by Exposure of ZnSe Layer to Ga and Se Molecular Beam / p145 (0080.jp2)
- 7-4 Molecular Beam Epitaxial Growth of ZnGa₂Se₄ Thin Films / p178 (0097.jp2)
- 7-5 Photoconductivity of ZnGa₂Se₄ Thin Films / p182 (0099.jp2)
- 7-6 Summary / p186 (0101.jp2)
- Chapter 8 General Conclusions and Future Prospects / p189 (0102.jp2)
- Acknowledgment / p195 (0105.jp2)
- References / p197 (0106.jp2)
- List of Publications / p205 (0110.jp2)