Study on microanalysis of solids by using focused ion beam 収束イオンビームを用いた微小領域固体表面分析法の研究
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著者
書誌事項
- タイトル
-
Study on microanalysis of solids by using focused ion beam
- タイトル別名
-
収束イオンビームを用いた微小領域固体表面分析法の研究
- 著者名
-
坂本, 哲夫
- 著者別名
-
サカモト, テツオ
- 学位授与大学
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東京大学
- 取得学位
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博士 (工学)
- 学位授与番号
-
甲第12630号
- 学位授与年月日
-
1997-03-28
注記・抄録
博士論文
目次
- CONTENTS / p1 (0004.jp2)
- 1 General Introduction / p1 (0012.jp2)
- 1.1 Background and Object of This Study / p1 (0012.jp2)
- 1.2 Secondary Ion Mass Spectrometry;SIMS / p8 (0019.jp2)
- 1.3 Gallium Focused Ion Beam SIMS / p10 (0021.jp2)
- 1.4 Problems in Microanalysis / p15 (0026.jp2)
- 1.5 Framework of This Study / p23 (0034.jp2)
- 2 Oxygen Enhancement Effect / p28 (0039.jp2)
- 2.1 Introduction / p28 (0039.jp2)
- 2.2 Experiments / p30 (0041.jp2)
- 2.3 Model Calculation / p31 (0042.jp2)
- 2.4 Experimental Results and Discussion / p37 (0048.jp2)
- 2.5 Results of Calculation and Discussion / p46 (0057.jp2)
- 2.6 Conclusions / p57 (0068.jp2)
- 3 Behavior of Ga⁺ Secondary Ion Intensity in Ga FIB SIMS / p60 (0071.jp2)
- 3.1 Introduction / p60 (0071.jp2)
- 3.2 Experiments / p61 (0072.jp2)
- 3.3 Results and Discussion / p62 (0073.jp2)
- 3.4 Conclusion / p75 (0086.jp2)
- 4 Erosion of a Particle by FIB Bombardment / p77 (0088.jp2)
- 4.1 Introduction / p77 (0088.jp2)
- 4.2 Experiment / p78 (0089.jp2)
- 4.3 Simulation / p79 (0090.jp2)
- 4.4 Results and Discussion / p85 (0096.jp2)
- 4.5 Conclusion / p96 (0107.jp2)
- 5 EPMA and SIMS Analysis of Suspended Particulate Matters / p98 (0109.jp2)
- 5.1 Introduction / p98 (0109.jp2)
- 5.2 Problems in the Same Particle Analysis / p99 (0110.jp2)
- 5.3 Experiments / p100 (0111.jp2)
- 5.4 Results and Discussion / p103 (0114.jp2)
- 5.5 Conclusion / p109 (0120.jp2)
- 6 Ion and Electron Dual Focused Beam Apparatus / p112 (0123.jp2)
- 6.1 Introduction / p112 (0123.jp2)
- 6.2 Basic Concept / p113 (0124.jp2)
- 6.3 Overall Configuration / p121 (0132.jp2)
- 6.4 Controller and Signal Processor / p125 (0136.jp2)
- 6.5 Test Analyses / p133 (0144.jp2)
- 6.6 Conclusions / p150 (0161.jp2)
- 7 General Conclusion / p152 (0163.jp2)
- A Publications / p158 (0169.jp2)
- A.1 Articles / p158 (0169.jp2)
- A.2 International Conferences / p159 (0170.jp2)
- A.3 Meetings / p159 (0170.jp2)
- B Acknowledgments / p161 (0172.jp2)