Studies on combined scanning capacitance/force microscopy

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博士論文

資料形態 : テキストデータプレーンテキスト

コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 博士論文

Contents
1 Introduction
1.1 Historical backgrounds
1.2 Scanning force microscopy
1.3 Scanning capacitance microscopy
1.4 Scanning probe microscopy memory
1.5 Problems in SCM and the aims of this work
1.6 Outline of this thesis
2 Basic principles
2.1 Scanning force microscopy
2.2 Cantilever as a force sensor
2.3 Cantilever deflection sensing
2.4 Scanning capacitance microscopy
2.5 Charge injection memory
3 Scanning force microscope with a double-focus lens interferometer
3.1 Introduction
3.2 Optical design
3.3 Experimental system
3.4 Results and discussion
3.5 Conclusions
4 Tapping mode capacitance microscopy
4.1 Introduction
4.2 Principle
4.3 Experimental setup
4.4 Experiment
4.5 Results and discussion
4.6 Conclusions
5 Tip-sample capacitance in capacitance microscopy of dielectric/electrode samples
5.1 Introduction
5.2 Theoretical approach by the method of images
5.3 Results and discussion
5.4 Conclusions
6 Tapping mode capacitance microscopy of a nitride-oxide-silicon recording medium
6.1 Introduction
6.2 Principle
6.3 Experimental setup
6.4 Experimental procedure
6.5 Results and discussion
6.6 Conclusions
7 Application of a semiconductor tip to capacitance microscopy
7.1 Introduction
7.2 Principle
7.3 Experimental setup
7.4 Experiment
7.5 Discussion
7.6 Conclusions
8 Summary
A Micro-indentation with a force microscope tip assisted by electrostatic force
A.1 Introduction
A.2 Principle
A.3 Experimental setup
A.4 Experiment
A.5 Results and discussion
A.6 Conclusions