Studies on combined scanning capacitance/force microscopy 走査型静電容量・力複合顕微鏡に関する研究
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著者
書誌事項
- タイトル
-
Studies on combined scanning capacitance/force microscopy
- タイトル別名
-
走査型静電容量・力複合顕微鏡に関する研究
- 著者名
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後藤, 和也
- 著者別名
-
ゴトウ, カズヤ
- 学位授与大学
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東北大学
- 取得学位
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博士 (工学)
- 学位授与番号
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甲第6390号
- 学位授与年月日
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1998-03-25
注記・抄録
博士論文
資料形態 : テキストデータ プレーンテキスト
コレクション : 国立国会図書館デジタルコレクション > デジタル化資料 > 博士論文
目次
- Contents
- 1 Introduction
- 1.1 Historical backgrounds
- 1.2 Scanning force microscopy
- 1.3 Scanning capacitance microscopy
- 1.4 Scanning probe microscopy memory
- 1.5 Problems in SCM and the aims of this work
- 1.6 Outline of this thesis
- 2 Basic principles
- 2.1 Scanning force microscopy
- 2.2 Cantilever as a force sensor
- 2.3 Cantilever deflection sensing
- 2.4 Scanning capacitance microscopy
- 2.5 Charge injection memory
- 3 Scanning force microscope with a double-focus lens interferometer
- 3.1 Introduction
- 3.2 Optical design
- 3.3 Experimental system
- 3.4 Results and discussion
- 3.5 Conclusions
- 4 Tapping mode capacitance microscopy
- 4.1 Introduction
- 4.2 Principle
- 4.3 Experimental setup
- 4.4 Experiment
- 4.5 Results and discussion
- 4.6 Conclusions
- 5 Tip-sample capacitance in capacitance microscopy of dielectric/electrode samples
- 5.1 Introduction
- 5.2 Theoretical approach by the method of images
- 5.3 Results and discussion
- 5.4 Conclusions
- 6 Tapping mode capacitance microscopy of a nitride-oxide-silicon recording medium
- 6.1 Introduction
- 6.2 Principle
- 6.3 Experimental setup
- 6.4 Experimental procedure
- 6.5 Results and discussion
- 6.6 Conclusions
- 7 Application of a semiconductor tip to capacitance microscopy
- 7.1 Introduction
- 7.2 Principle
- 7.3 Experimental setup
- 7.4 Experiment
- 7.5 Discussion
- 7.6 Conclusions
- 8 Summary
- A Micro-indentation with a force microscope tip assisted by electrostatic force
- A.1 Introduction
- A.2 Principle
- A.3 Experimental setup
- A.4 Experiment
- A.5 Results and discussion
- A.6 Conclusions