Studies on combined scanning capacitance/force microscopy 走査型静電容量・力複合顕微鏡に関する研究
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著者
書誌事項
- タイトル
-
Studies on combined scanning capacitance/force microscopy
- タイトル別名
-
走査型静電容量・力複合顕微鏡に関する研究
- 著者名
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後藤, 和也
- 著者別名
-
ゴトウ, カズヤ
- 学位授与大学
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東北大学
- 取得学位
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博士 (工学)
- 学位授与番号
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甲第6390号
- 学位授与年月日
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1998-03-25
注記・抄録
博士論文
目次
- Contents / p1 (0004.jp2)
- 1 Introduction / p1 (0011.jp2)
- 1.1 Historical backgrounds / p1 (0011.jp2)
- 1.2 Scanning force microscopy / p4 (0014.jp2)
- 1.3 Scanning capacitance microscopy / p7 (0017.jp2)
- 1.4 Scanning probe microscopy memory / p10 (0020.jp2)
- 1.5 Problems in SCM and the aims of this work / p13 (0023.jp2)
- 1.6 Outline of this thesis / p15 (0025.jp2)
- 2 Basic principles / p20 (0030.jp2)
- 2.1 Scanning force microscopy / p20 (0030.jp2)
- 2.2 Cantilever as a force sensor / p24 (0034.jp2)
- 2.3 Cantilever deflection sensing / p27 (0037.jp2)
- 2.4 Scanning capacitance microscopy / p31 (0041.jp2)
- 2.5 Charge injection memory / p37 (0047.jp2)
- 3 Scanning force microscope with a double-focus lens interferometer / p40 (0050.jp2)
- 3.1 Introduction / p40 (0050.jp2)
- 3.2 Optical design / p41 (0051.jp2)
- 3.3 Experimental system / p44 (0054.jp2)
- 3.4 Results and discussion / p51 (0061.jp2)
- 3.5 Conclusions / p53 (0063.jp2)
- 4 Tapping mode capacitance microscopy / p61 (0071.jp2)
- 4.1 Introduction / p61 (0071.jp2)
- 4.2 Principle / p63 (0073.jp2)
- 4.3 Experimental setup / p65 (0075.jp2)
- 4.4 Experiment / p67 (0077.jp2)
- 4.5 Results and discussion / p68 (0078.jp2)
- 4.6 Conclusions / p71 (0081.jp2)
- 5 Tip-sample capacitance in capacitance microscopy of dielectric/electrode samples / p78 (0088.jp2)
- 5.1 Introduction / p78 (0088.jp2)
- 5.2 Theoretical approach by the method of images / p80 (0090.jp2)
- 5.3 Results and discussion / p87 (0097.jp2)
- 5.4 Conclusions / p90 (0100.jp2)
- 6 Tapping mode capacitance microscopy of a nitride-oxide-silicon recording medium / p98 (0108.jp2)
- 6.1 Introduction / p98 (0108.jp2)
- 6.2 Principle / p100 (0110.jp2)
- 6.3 Experimental setup / p104 (0114.jp2)
- 6.4 Experimental procedure / p106 (0116.jp2)
- 6.5 Results and discussion / p107 (0117.jp2)
- 6.6 Conclusions / p111 (0121.jp2)
- 7 Application of a semiconductor tip to capacitance microscopy / p120 (0130.jp2)
- 7.1 Introduction / p120 (0130.jp2)
- 7.2 Principle / p121 (0131.jp2)
- 7.3 Experimental setup / p123 (0133.jp2)
- 7.4 Experiment / p125 (0135.jp2)
- 7.5 Discussion / p129 (0139.jp2)
- 7.6 Conclusions / p129 (0139.jp2)
- 8 Summary / p134 (0144.jp2)
- A Micro-indentation with a force microscope tip assisted by electrostatic force / p137 (0147.jp2)
- A.1 Introduction / p137 (0147.jp2)
- A.2 Principle / p139 (0149.jp2)
- A.3 Experimental setup / p141 (0151.jp2)
- A.4 Experiment / p142 (0152.jp2)
- A.5 Results and discussion / p143 (0153.jp2)
- A.6 Conclusions / p146 (0156.jp2)
