Numerical computations of time-dependent three-dimensional transport phenomena of silicon melt in the Czochralski process using a cusp-shaped magnetic field カスプ磁場Cz法におけるシリコン融液の非定常3次元輸送現象の数値計算

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著者

    • 元, 裕喆 ウォン, ユーチョル

書誌事項

タイトル

Numerical computations of time-dependent three-dimensional transport phenomena of silicon melt in the Czochralski process using a cusp-shaped magnetic field

タイトル別名

カスプ磁場Cz法におけるシリコン融液の非定常3次元輸送現象の数値計算

著者名

元, 裕喆

著者別名

ウォン, ユーチョル

学位授与大学

九州大学

取得学位

博士(工学)

学位授与番号

甲第4850号

学位授与年月日

1999-03-25

注記・抄録

博士論文

目次

  1. 論文目録 / (0004.jp2)
  2. 論文内容の要旨 / (0006.jp2)
  3. Contents / p1 (0008.jp2)
  4. List of Tables / p3 (0009.jp2)
  5. List of Figures / p4 (0010.jp2)
  6. Nomenclature / p12 (0014.jp2)
  7. 1.Introduction / p1 (0016.jp2)
  8. 1.1.Czochralski process as a crystal growing method / p1 (0016.jp2)
  9. 1.2.Magnetic Czochralski method / p4 (0017.jp2)
  10. 1.3.Research objectives / p7 (0019.jp2)
  11. 1.4.Thesis outline / p8 (0019.jp2)
  12. 2.Mathematical background / p11 (0021.jp2)
  13. 2.1.Mathematical model / p11 (0021.jp2)
  14. 2.2.Governing equations / p14 (0022.jp2)
  15. 2.3.Boundary conditions / p15 (0023.jp2)
  16. 2.4.Computational schemes / p17 (0024.jp2)
  17. 3.Transient three-dimensional flow characteristics of the silicon melt in a Czochralski configuration under a cusp-shaped magnetic field / p20 (0025.jp2)
  18. 3.1.Mathematical model / p20 (0025.jp2)
  19. 3.2.Boundary conditions / p22 (0026.jp2)
  20. 3.3.Computational scheme / p23 (0027.jp2)
  21. 3.4.Results and discussion / p24 (0027.jp2)
  22. 3.5.Conclusion / p28 (0029.jp2)
  23. 4.Transient three-dimensional numerical computation for unsteady oxygen concentration in silicon melt during a Czochralski process under a cusp-shaped magnetic field / p45 (0038.jp2)
  24. 4.1.Mathematical model / p46 (0038.jp2)
  25. 4.2.Boundary conditions / p47 (0039.jp2)
  26. 4.3.Computational scheme / p49 (0040.jp2)
  27. 4.4.Results and discussion / p50 (0040.jp2)
  28. 4.5.Conclusion / p53 (0042.jp2)
  29. 5.Transient three-dimensional characteristics of heat and fluid flow of silicon melt in a Czochralski configuration by the change of relative position of a cusp-shaped magnetic field to the melt / p68 (0049.jp2)
  30. 5.1.The system considered / p68 (0049.jp2)
  31. 5.2.Results / p69 (0050.jp2)
  32. 5.3.Discussion / p80 (0055.jp2)
  33. 5.4.Conclusion / p82 (0056.jp2)
  34. 6.Transient three-dimensional characteristics of oxygen transfer of silicon melt in a Czochralski configuration by the change of relative position of a cusp-shaped magnetic field to the melt / p134 (0082.jp2)
  35. 6.1.Mathematical model / p135 (0083.jp2)
  36. 6.2.Boundary conditions / p137 (0084.jp2)
  37. 6.3.Results / p139 (0085.jp2)
  38. 6.4.Discussion / p142 (0086.jp2)
  39. 6.5.Conclusion / p143 (0087.jp2)
  40. 7.Concluding Remarks / p161 (0096.jp2)
  41. Bibliography / p164 (0097.jp2)
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各種コード

  • NII論文ID(NAID)
    500000171826
  • NII著者ID(NRID)
    • 8000000172100
  • DOI(NDL)
  • NDL書誌ID
    • 000000336140
  • データ提供元
    • NDL-OPAC
    • NDLデジタルコレクション
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